Current status and trends of stitching interferometry in synchrotron radiation field
文献类型：期刊论文
| 作者 | Liu DX(刘丁枭) ; Sheng WF(盛伟繁); Wang QS(王秋实); Li M(李明)
|
| 刊名 | Optics and Precision Engineering
 |
| 出版日期 | 2016 |
| 卷号 | 24期号:10页码:2357-2369- |
| DOI | 10.3788/OPE.20162410.2357 |
| 其他题名 | 拼接干涉技术在同步辐射领域的发展现状及趋势 |
| 通讯作者 | 盛伟繁 |
| 文献子类 | 期刊论文 |
| 英文摘要 | In synchrotron radiation field, the apertures of optical components increase gradually and their surface figure precisions have been demanded to be a nano-radian level. This paper researches the modern surface figure measurement methods in this field, stitching interferometry, to realize the high resolution two-dimensional measurement of optical components. The basic principles of the stitching interferometry are introduced. Then, a series of common optical surface shape measurement instruments in the synchrotron radiation field are overviewed, such as long trace profilers based on laser beams, high precision and auto-collimation measuring machines for nanometer optical components and stitching interferometers. It describes their development history and working characteristics and compares their shortcomings and advantages. Finally, this paper analyzes the main error sources involved in the stitching interferometry, and points out that the application and development trends of the technology are mainly the innovation of the stitching algorithm, the improvement of measuring speeds of interferometers, the commercialization of interferometers and the integration of the interferometry and other science technologies. 漏 2016, Science Press. All right reserved. |
| 语种 | 中文 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/260354]  |
| 专题 | 高能物理研究所_多学科研究中心 高能物理研究所_粒子天体物理中心 |
| 作者单位 | 中国科学院高能物理研究所 |
| 推荐引用方式 GB/T 7714 | Liu DX,Sheng WF,Wang QS,et al. Current status and trends of stitching interferometry in synchrotron radiation field[J]. Optics and Precision Engineering,2016,24(10):2357-2369-. |
| APA | 刘丁枭,盛伟繁,王秋实,&李明.(2016).Current status and trends of stitching interferometry in synchrotron radiation field.Optics and Precision Engineering,24(10),2357-2369-. |
| MLA | 刘丁枭,et al."Current status and trends of stitching interferometry in synchrotron radiation field".Optics and Precision Engineering 24.10(2016):2357-2369-. |
入库方式： OAI收割
来源：高能物理研究所
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