Gas sensor based on ZnO film/silica pillars
文献类型：期刊论文
| 作者 | Wang YT(王雨婷); Zhou Y(周悦); Liu, J; Liang, YX; Yi, FT; Wang, B; Zhang, TC; Zhou, Y; Wang, YT; Liu J(刘静)
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| 刊名 | MATERIALS RESEARCH EXPRESS
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| 出版日期 | 2016 |
| 卷号 | 3期号:12 |
| 关键词 | substrate gas sensor zinc oxide magnetron sputtering pillar |
| DOI | 10.1088/2053-1591/3/12/125701 |
| 英文摘要 | Silica submicron pillars are used as substrate for Zinc oxide (ZnO) gas sensor for the first time. The submicron pillars with the large surface ratio can improve the gas sensing performance obviously. Silicon pillars are fabricated by cesium chloride (CsCl) self-assembly lithography and inductively coupled plasma dry etching as substrate, the ZnO film is deposited on the pillars surface by RF magnetron sputtering. With this method, the pillar based gas sensor has the higher gas response, the shorter response and recovery time than the planar one with different working temperatures, different gas concentrations. 300 degrees C is the best working temperature, for planar gas sensor, the gas response is 22.81 for 1520 ppm ethanol, the response time is 55 s and the recovery time is 169 s. While for the pillar based one, the gas response is 28.20, the response time is 51 s and the recovery time is 92 s. |
| 语种 | 英语 |
| WOS记录号 | WOS:000391542100001 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/260454]  |
| 专题 | 高能物理研究所_多学科研究中心 |
| 作者单位 | 中国科学院高能物理研究所 |
| 推荐引用方式 GB/T 7714 | Wang YT,Zhou Y,Liu, J,et al. Gas sensor based on ZnO film/silica pillars[J]. MATERIALS RESEARCH EXPRESS,2016,3(12). |
| APA | 王雨婷.,周悦.,Liu, J.,Liang, YX.,Yi, FT.,...&张天冲.(2016).Gas sensor based on ZnO film/silica pillars.MATERIALS RESEARCH EXPRESS,3(12). |
| MLA | 王雨婷,et al."Gas sensor based on ZnO film/silica pillars".MATERIALS RESEARCH EXPRESS 3.12(2016). |
入库方式： OAI收割
来源：高能物理研究所
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