Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method
文献类型：期刊论文
| 作者 | Zhang, XW; Li, M; Li M(李明) ; Yang, FG; Zhang XW(张晓伟); Cai, Q; Liu, P; Sheng, WF; Yang FG(杨福桂); Cai Q(蔡泉)
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| 刊名 | 8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBNANOMETER ACCURACY MEASUREMENT FOR SYNCHROTRON OPTICS AND X-RAY OPTICS
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| 出版日期 | 2016 |
| 卷号 | 9687页码:- |
| 关键词 | slope profiler X-ray optics wavefront coding spatial modulator |
| DOI | 10.1117/12.2244271 |
| 通讯作者 | 杨福桂 |
| 英文摘要 | The quality of X-ray optics on beamline is a key factor that limits the performance of the beam line to play. For X-ray mirror surface characterization with high accuracy, long trace profiler and NOM for flat or slight curved mirror have been developed. However, these two kind of instruments cannot measure the highly curved mirror since requirement of high precision and that of large range contradict each other. In this paper, we proposed a novel wavefront-coding-based surface slope metrology technique. Four-dimension information of the optics under test, including x-y position and sagittal/tangential angle, is provided. Due to the focused beam used and the high speed DMD (Digital Mirror Device), high spatial resolution of the measurement is obtained. In experiment, we demonstrated this technique by measuring bend-based high energy monochromator developed in BSRF. |
| 语种 | 英语 |
| WOS记录号 | WOS:000387730600005 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/260482]  |
| 专题 | 高能物理研究所_多学科研究中心 |
| 作者单位 | 中国科学院高能物理研究所 |
| 推荐引用方式 GB/T 7714 | Zhang, XW,Li, M,Li M,et al. Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method[J]. 8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBNANOMETER ACCURACY MEASUREMENT FOR SYNCHROTRON OPTICS AND X-RAY OPTICS,2016,9687:-. |
| APA | Zhang, XW.,Li, M.,李明.,Yang, FG.,张晓伟.,...&盛伟繁.(2016).Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method.8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBNANOMETER ACCURACY MEASUREMENT FOR SYNCHROTRON OPTICS AND X-RAY OPTICS,9687,-. |
| MLA | Zhang, XW,et al."Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method".8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBNANOMETER ACCURACY MEASUREMENT FOR SYNCHROTRON OPTICS AND X-RAY OPTICS 9687(2016):-. |
入库方式： OAI收割
来源：高能物理研究所
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