Fabrication of a multilayered optical device based on submicron polyimide film
文献类型：期刊论文
| 作者 | Hu W(胡渭) ; Chen TX(陈田祥); Chen Y(陈勇)
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| 刊名 | PROCEEDINGS OF THE 2016 4TH INTERNATIONAL CONFERENCE ON MACHINERY, MATERIALS AND COMPUTING TECHNOLOGY
 |
| 出版日期 | 2016 |
| 卷号 | 60页码:897 |
| 关键词 | polyimide filter film space mission atomic oxygen |
| DOI | 10.2991/icmmct-16.2016.178 |
| 通讯作者 | 胡渭 ; 陈田祥 ; 陈勇 |
| 英文摘要 | A submicron polyimide film (< 1 mu m) with high thickness uniformity was prepared via spin-coating method. Aluminum foil and patterned nickel mesh were sequentially fabricated on the surface of polyimide film using magnetron sputtering and micro-electroforming. Transmittance of the device in UV-vis waveband indicated that the thickness of aluminum plays a dominant important role rather than the other layers. The results of atomic oxygen erosion experiment of the multilayered structure, investigated by ground-based simulation facility, suggests that the Al foil was capable of protecting PI film from atomic oxygen erosion. |
| 语种 | 英语 |
| WOS记录号 | WOS:000387481800178 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/260812]  |
| 专题 | 高能物理研究所_粒子天体物理中心 |
| 作者单位 | 中国科学院高能物理研究所 |
| 推荐引用方式 GB/T 7714 | Hu W,Chen TX,Chen Y. Fabrication of a multilayered optical device based on submicron polyimide film[J]. PROCEEDINGS OF THE 2016 4TH INTERNATIONAL CONFERENCE ON MACHINERY, MATERIALS AND COMPUTING TECHNOLOGY,2016,60:897. |
| APA | 胡渭,陈田祥,&陈勇.(2016).Fabrication of a multilayered optical device based on submicron polyimide film.PROCEEDINGS OF THE 2016 4TH INTERNATIONAL CONFERENCE ON MACHINERY, MATERIALS AND COMPUTING TECHNOLOGY,60,897. |
| MLA | 胡渭,et al."Fabrication of a multilayered optical device based on submicron polyimide film".PROCEEDINGS OF THE 2016 4TH INTERNATIONAL CONFERENCE ON MACHINERY, MATERIALS AND COMPUTING TECHNOLOGY 60(2016):897. |
入库方式： OAI收割
来源：高能物理研究所
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