ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication
文献类型：期刊论文
| 作者 | Cao Zhengcai ; Zhao Huidan ; Wang Yongji |
| 刊名 | CHINESE JOURNAL OF ELECTRONICS
 |
| 出版日期 | 2013 |
| 卷号 | 22期号:1页码:25-30 |
| 关键词 | Semiconductor manufacturing system Scheduling Adaptive neuro-fuzzy inference system Simulated annealing algorithm |
| ISSN号 | 1022-4653 |
| 中文摘要 | In this paper, an optimized mechanism for Semiconductor wafer fabrication (SWF) by integrating the Adaptive neuro-fuzzy inference system (ANFIS) with Simulated annealing (SA) algorithm is proposed. In this approach, aiming to solve the rush order problem which significantly affect the cycle time and impact the Work in process (WIP) of lots due to the high priority, we build an ANFIS based prediction model which will be embedded into releasing to forecast product codes and quantities of the contingent rush orders. Then a scheduler based on SA algorithm is constructed, the coding of which represents a combination of scheduling policies, including lot releasing policies, dispatching rules, batching rules and setting-up rules. When the SA finished its optimization process, an optimal scheduling policy is produced. By using the proposed approach, we will find that the system can be optimized to a large extent and give a better performance. |
| 英文摘要 | In this paper, an optimized mechanism for Semiconductor wafer fabrication (SWF) by integrating the Adaptive neuro-fuzzy inference system (ANFIS) with Simulated annealing (SA) algorithm is proposed. In this approach, aiming to solve the rush order problem which significantly affect the cycle time and impact the Work in process (WIP) of lots due to the high priority, we build an ANFIS based prediction model which will be embedded into releasing to forecast product codes and quantities of the contingent rush orders. Then a scheduler based on SA algorithm is constructed, the coding of which represents a combination of scheduling policies, including lot releasing policies, dispatching rules, batching rules and setting-up rules. When the SA finished its optimization process, an optimal scheduling policy is produced. By using the proposed approach, we will find that the system can be optimized to a large extent and give a better performance. |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000317701800005 |
| 公开日期 | 2014-12-16 |
| 源URL | [http://ir.iscas.ac.cn/handle/311060/16957]  |
| 专题 | 软件研究所_软件所图书馆_期刊论文 |
| 推荐引用方式 GB/T 7714 | Cao Zhengcai,Zhao Huidan,Wang Yongji. ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication[J]. CHINESE JOURNAL OF ELECTRONICS,2013,22(1):25-30. |
| APA | Cao Zhengcai,Zhao Huidan,&Wang Yongji.(2013).ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication.CHINESE JOURNAL OF ELECTRONICS,22(1),25-30. |
| MLA | Cao Zhengcai,et al."ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication".CHINESE JOURNAL OF ELECTRONICS 22.1(2013):25-30. |
入库方式： OAI收割
来源：软件研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。