Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system
文献类型：期刊论文
| 作者 | Chen, Hui1,2; Chen, Albert3; Sun, Wei Jie1; Sun, Zhen Dong4; Yeow, John T. W.3 |
| 刊名 | INTERNATIONAL JOURNAL OF OPTOMECHATRONICS
 |
| 出版日期 | 2016-01-02 |
| 卷号 | 10期号:1页码:1-13 |
| 关键词 | micromirror adaptive algorithm sidewall electrodes 2-D image SMC MEMS laser scanning microscope |
| ISSN号 | 1559-9612 |
| DOI | 10.1080/15599612.2015.1095956 |
| 英文摘要 | This article presents the development and implementation of a robust nonlinear control scheme for a 2-D micromirror-based laser scanning microscope system. The presented control scheme, built around sliding mode control approach and augmented an adaptive algorithm, is proposed to improve the tracking accuracy in presence of cross-axis effect. The closed-loop controlled imaging system is developed through integrating a 2-D micromirror with sidewall electrodes (SW), a laser source, NI field-programmable gate array (FPGA) hardware, the optics, position sensing detector (PSD) and photo detector (PD). The experimental results demonstrated that the proposed scheme is able to achieve accurate tracking of a reference triangular signal. Compared with open-loop control, the scanning performance is significantly improved, and a better 2-D image is obtained using the micromirror with the proposed scheme. |
| 资助项目 | National Basic Research Program of China (973 program)[2014CB845302] ; National Natural Science Foundation (NNSF) of China[61374036] ; National Natural Science Foundation (NNSF) of China[61273121] ; Natural Science Foundation of Guangdong Province[2014A030313237] ; Natural Science Foundation of Guangdong Province[2015A030313200] ; Natural Science and Engineering Research Council of Canada |
| WOS研究方向 | Engineering ; Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000373737400001 |
| 出版者 | TAYLOR & FRANCIS INC |
| 源URL | [http://ir.amss.ac.cn/handle/2S8OKBNM/22456]  |
| 专题 | 中国科学院数学与系统科学研究院 |
| 通讯作者 | Yeow, John T. W. |
| 作者单位 | 1.S China Univ Technol, Coll Automat Sci & Engn, Guangzhou 510641, Guangdong, Peoples R China 2.HeNan Univ, Sch Comp & Informat Engn, Kaifeng, Peoples R China 3.Univ Waterloo, Syst Design Engn, Waterloo, ON N2L 3G1, Canada 4.Chinese Acad Sci, Acad Math & Syst Sci, Key Lab Syst & Control, Beijing, Peoples R China |
| 推荐引用方式 GB/T 7714 | Chen, Hui,Chen, Albert,Sun, Wei Jie,et al. Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system[J]. INTERNATIONAL JOURNAL OF OPTOMECHATRONICS,2016,10(1):1-13. |
| APA | Chen, Hui,Chen, Albert,Sun, Wei Jie,Sun, Zhen Dong,&Yeow, John T. W..(2016).Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system.INTERNATIONAL JOURNAL OF OPTOMECHATRONICS,10(1),1-13. |
| MLA | Chen, Hui,et al."Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system".INTERNATIONAL JOURNAL OF OPTOMECHATRONICS 10.1(2016):1-13. |
入库方式： OAI收割
来源：数学与系统科学研究院
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