中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
首页 机构 成果 学者
  
  1. CAS IR Grid
  2. 数学与系统科学研究院
  3. 中国科学院数学与系统科学研究院
  4. 系统科学研究所
Optimization on benzocyclobutene-based CMUT fabrication with an inverse structure

文献类型：期刊论文

作者Li, Zhenhao1; Na, Shuai1; Chen, Albert I. H.1; Wong, Lawrence L. P.1; Sun, Zhendong3; Liu, Ping4; Yeow, John T. W.1,2
刊名SENSORS AND ACTUATORS A-PHYSICAL
出版日期2018-10-01
卷号281页码:1-8
关键词Capacitive micromachined ultrasonic transducer Adhesive wafer bonding Photosensitive benzocyclobutene Resonator
ISSN号0924-4247
DOI10.1016/j.sna.2018.08.036
英文摘要It has been demonstrated that the adhesive wafer bonding technique benefits the fabrication of capacitive micromachined ultrasonic transducers (CMUTs) in the aspects of structural flexibility, CMOS process compatibility, and fabrication yield. Recently, the feasibility of fabricating CMUTs using benzocyclobutene (BCB) based polymer as both the adhesive and structural material was reported. However, the issues of voids at the wafer bonding interface, material deformation and electrode distance control need to be addressed. In this paper, we present an improved fabrication process that allows a void-free device with reduced polymer deformation. The chemical reactions during the BCB curing process were revealed using Fourier transform infrared spectroscopy. Microscopy and cross-sectional SEM images were employed to illustrate the structure improvement in terms of voids and polymer deformation. In addition, an inverse structure that allows an accurate control of the effective electrode distance was presented. The cross-sectional SEM images and the impedance measurement showing the dynamic response of the CMUT demonstrated the feasibility of this inverse structure. The differences between the inverse structure and the conventional structure were also discussed and compared. (C) 2018 Elsevier B.V. All rights reserved.
资助项目Natural Sciences and Engineering Research Council of Canada ; CMC Microsystems
WOS研究方向Engineering ; Instruments & Instrumentation
语种英语
WOS记录号WOS:000447476300001
出版者ELSEVIER SCIENCE SA
源URL[http://ir.amss.ac.cn/handle/2S8OKBNM/31388]  
专题系统科学研究所
通讯作者Liu, Ping; Yeow, John T. W.
作者单位1.Univ Waterloo, Dept Syst Design Engn, 200 Univ Ave W, Waterloo, ON N2L 3G1, Canada
2.Univ Waterloo, Waterloo Inst Nanotechnol, 200 Univ Ave W, Waterloo, ON N2L 3G1, Canada
3.Chinese Acad Sci, Acad Math & Syst Sci, Key Lab Syst Control, Beijing 100190, Peoples R China
4.Dongguan Univ Technol, Sch Elect Engn & Intelligentizat, Dongguan 523808, Guangdong, Peoples R China
推荐引用方式
GB/T 7714		 Li, Zhenhao,Na, Shuai,Chen, Albert I. H.,et al. Optimization on benzocyclobutene-based CMUT fabrication with an inverse structure[J]. SENSORS AND ACTUATORS A-PHYSICAL,2018,281:1-8.
APA Li, Zhenhao.,Na, Shuai.,Chen, Albert I. H..,Wong, Lawrence L. P..,Sun, Zhendong.,...&Yeow, John T. W..(2018).Optimization on benzocyclobutene-based CMUT fabrication with an inverse structure.SENSORS AND ACTUATORS A-PHYSICAL,281,1-8.
MLA Li, Zhenhao,et al."Optimization on benzocyclobutene-based CMUT fabrication with an inverse structure".SENSORS AND ACTUATORS A-PHYSICAL 281(2018):1-8.

入库方式： OAI收割

来源：数学与系统科学研究院

浏览0
下载0
收藏0
其他版本

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。