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Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization

文献类型：期刊论文

作者Zheng, Zhou1; Na, Shuai1; Chen, Albert I. -Hsiang1; Li, Zhenhao1; Wong, Lawrence L. P.1; Sun, Zhendong2; Yao, Yao3; Liu, Ping4; Yeow, John T. W.1
刊名JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
出版日期2018-06-01
卷号27期号:3页码:538-546
关键词Annular element capacitive micromachined ultrasonic transducer (CMUT) concentric deep reactive-ion etching dual-element hybrid transducer
ISSN号1057-7157
DOI10.1109/JMEMS.2018.2828423
英文摘要Capacitive micromachined ultrasonic transducers (CMUTs) have shown great potential to make a strong impact on ultrasound imaging technologies over the years. However, a critical weakness of CMUTs is their relatively low output pressure at transmission. To address this, we present a novel dualelement ultrasonic transducer that incorporates two transducer technologies by using a circular commercial piezoelectric element for ultrasound transmission and an annular CMUT element for reception. The hybrid transducer combines the broad bandwidth and high receive sensitivity of the CMUT and the high output pressure of the piezoelectric transducer to improve the overall sensitivity and axial resolution. The annular CMUT is designed, fabricated, and concentrically aligned with the piezoelectric probe via a custom housing. A through-wafer etching scheme based on deep reactive-ion etching is developed to create the CMUT annulus. Immersion characterization reveals that the CMUT has a center frequency of 2.63 MHz, a -6-dB fractional bandwidth of 131%, and a receive sensitivity of 22.57 mV/kPa, compared with 2.34 MHz, 42%, and 4.28 mV/kPa of the piezoelectric probe. The round-trip measurements show that the hybrid dual-element transducer improves the axial resolution by 25.58% and the signal-to-noise ratio by 8.55 dB over the commercial piezoelectric probe.
资助项目Natural Sciences and Engineering Research Council of Canada ; Canada Research Chairs Program ; CMC Microsystems ; China Scholarship Council
WOS研究方向Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
语种英语
WOS记录号WOS:000433954100022
出版者IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
源URL[http://ir.amss.ac.cn/handle/2S8OKBNM/30538]  
专题系统科学研究所
通讯作者Yeow, John T. W.
作者单位1.Univ Waterloo, Adv Micronanodevices Lab, Waterloo, ON N2L 3G1, Canada
2.Chinese Acad Sci, Acad Math & Syst Sci, Key Lab Syst & Control, Beijing 100190, Peoples R China
3.Chengdu Univ Informat Technol, Coll Commun Engn, Chengdu 610225, Sichuan, Peoples R China
4.Dongguan Univ Technol, Dept Elect Engn & Intelligentizat, Dongguan 523808, Peoples R China
推荐引用方式
GB/T 7714		 Zheng, Zhou,Na, Shuai,Chen, Albert I. -Hsiang,et al. Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2018,27(3):538-546.
APA Zheng, Zhou.,Na, Shuai.,Chen, Albert I. -Hsiang.,Li, Zhenhao.,Wong, Lawrence L. P..,...&Yeow, John T. W..(2018).Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,27(3),538-546.
MLA Zheng, Zhou,et al."Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 27.3(2018):538-546.

入库方式： OAI收割

来源：数学与系统科学研究院

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