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ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD

文献类型：期刊论文

作者Ji, Xia1; Cai, Wei2
刊名DISCRETE AND CONTINUOUS DYNAMICAL SYSTEMS-SERIES B
出版日期2011-03-01
卷号15期号:2页码:401-415
关键词Generalized discontinuous Galerkin method (GDG) discontinuous Galerkin method (DG) phase shift masks (PSM) perfectly matched layer (PML)
ISSN号1531-3492
DOI10.3934/dcdsb.2011.15.401
英文摘要In this paper, we apply a newly developed generalized discontinuous Galerkin (GDG) method for rigorous simulations of 2-D phase shift masks (PSM). The main advantage of the GDG method is its accurate treatment of jumps in solutions using the Dirac delta generalized functions as source terms of partial differential equations. The scattering problem of the PSM is cast with a total field/scattering field formulation while the GDG method is used to handle the inhomogeneous jump conditions between the total and scattering fields along the physical and perfectly matched layer (PML) interfaces. Numerical results demonstrate the high order accuracy of the GDG method and its capability of handling the non-periodic structures such as optical images near mask edges.
WOS研究方向Mathematics
语种英语
WOS记录号WOS:000285791100007
出版者AMER INST MATHEMATICAL SCIENCES
源URL[http://ir.amss.ac.cn/handle/2S8OKBNM/11505]  
专题计算数学与科学工程计算研究所
通讯作者Ji, Xia
作者单位1.Chinese Acad Sci, Inst Computat Math, LSEC, Beijing 100190, Peoples R China
2.Univ N Carolina, Dept Math & Stat, Charlotte, NC 28223 USA
推荐引用方式
GB/T 7714		 Ji, Xia,Cai, Wei. ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD[J]. DISCRETE AND CONTINUOUS DYNAMICAL SYSTEMS-SERIES B,2011,15(2):401-415.
APA Ji, Xia,&Cai, Wei.(2011).ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD.DISCRETE AND CONTINUOUS DYNAMICAL SYSTEMS-SERIES B,15(2),401-415.
MLA Ji, Xia,et al."ACCURATE SIMULATIONS OF 2-D PHASE SHIFT MASKS WITH A GENERALIZED DISCONTINUOUS GALERKIN (GDG) METHOD".DISCRETE AND CONTINUOUS DYNAMICAL SYSTEMS-SERIES B 15.2(2011):401-415.

入库方式： OAI收割

来源：数学与系统科学研究院

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