Electron-Beam Evaporated Superconducting Titanium Thin Films for Antenna-Coupled Transition Edge Sensors
文献类型：期刊论文
| 作者 | Wang, Zheng; Zhang, Wen; Miao, Wei; Liu, Dong; Zhong, Jia-Qiang; Shi, Sheng-Cai |
| 刊名 | IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
 |
| 出版日期 | 2018 |
| 卷号 | 28期号:4页码:2100204 |
| 英文摘要 | Superconducting titanium thin films are good candidates for transition edge sensors. In this paper, we deposit titanium thin films on cooled silicon-on-insulator substrates by using electron-beam evaporation. The deposition rate dependence of the film stress, resistivity, and superconducting transition temperature are presented and analyzed. The relationship between film electrical properties and thickness is discussed. For investigating the heating influence on thin Ti films, a depth profile of oxygen diffusion in the films is also analyzed by X-ray photoelectron spectroscopy. |
| 语种 | 英语 |
| WOS记录号 | WOS:000425741900001 |
| 源URL | [http://libir.pmo.ac.cn/handle/332002/18011]  |
| 专题 | 中国科学院紫金山天文台 |
| 推荐引用方式 GB/T 7714 | Wang, Zheng,Zhang, Wen,Miao, Wei,et al. Electron-Beam Evaporated Superconducting Titanium Thin Films for Antenna-Coupled Transition Edge Sensors[J]. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,2018,28(4):2100204. |
| APA | Wang, Zheng,Zhang, Wen,Miao, Wei,Liu, Dong,Zhong, Jia-Qiang,&Shi, Sheng-Cai.(2018).Electron-Beam Evaporated Superconducting Titanium Thin Films for Antenna-Coupled Transition Edge Sensors.IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,28(4),2100204. |
| MLA | Wang, Zheng,et al."Electron-Beam Evaporated Superconducting Titanium Thin Films for Antenna-Coupled Transition Edge Sensors".IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY 28.4(2018):2100204. |
入库方式： OAI收割
来源：紫金山天文台
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