中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Low frequency noise and radiation response in the partially depleted SOI MOSFETs with ion implanted buried oxide

文献类型:期刊论文

作者Liu, Y (Liu Yuan); Chen, HB (Chen Hai-Bo); Liu, YR (Liu Yu-Rong); Wang, X (Wang Xin); En, YF (En Yun-Fei); Li, B (Li Bin); Lu, YD (Lu Yu-Dong)
刊名CHINESE PHYSICS B
出版日期2015
卷号24期号:8页码:1-6
关键词SilicOn On Insulator Ion implantatIon Ionizing Radiation Low Frequency Noise
ISSN号1674-1056
DOI10.1088/1674-1056/24/8/088503
英文摘要

Low frequency noise behaviors of partially depleted silicon-on-insulator (PDSOI) n-channel metal-oxide semiconductors (MOS) transistors with and without ion implantation into the buried oxide are investigated in this paper. Owing to ion implantation-induced electron traps in the buried oxide and back interface states, back gate threshold voltage increases from 44.48 V to 51.47 V and sub-threshold swing increases from 2.47 V/dec to 3.37 V/dec, while electron field effect mobility decreases from 475.44 cm(2)/V.s to 363.65 cm(2)/V.s. In addition, the magnitude of normalized low frequency noise also greatly increases, which indicates that the intrinsic electronic performances are degenerated after ion implantation processing. According to carrier number fluctuation theory, the extracted flat-band voltage noise power spectral densities in the PDSOI devices with and without ion implantation are equal to 7 x 10(-10) V-2.Hz(-1) and 2.7 x 10(-8) V-2 .Hz(-1), respectively, while the extracted average trap density in the buried oxide increases from 1.42 x 10(17) cm(-3).eV(-1) to 6.16 x 10(18) cm(-3).eV(-1). Based on carrier mobility fluctuation theory, the extracted average Hooge's parameter in these devices increases from 3.92 x 10(-5) to 1.34 x 10(-2) after ion implantation processing. Finally, radiation responses in the PDSOI devices are investigated. Owing to radiation-induced positive buried oxide trapped charges, back gate threshold voltage decreases with the increase of the total dose. After radiation reaches up to a total dose of 1 M.rad(si), the shifts of back gate threshold voltage in the SOI devices with and without ion implantation are 10.82 V and 31.84 V, respectively. The low frequency noise behaviors in these devices before and after radiation are also compared and discussed.

WOS记录号WOS:000361906000094
源URL[http://ir.xjipc.cas.cn/handle/365002/5148]  
专题新疆理化技术研究所_材料物理与化学研究室
通讯作者Lu, YD (Lu Yu-Dong)
作者单位1.CEPREI, Sci & Technol Reliabil Phys & Applicat Elect Comp, Guangzhou 510610, Guangdong, Peoples R China
2.China Elect Technol Grp Corp, Res Inst 58, Wuxi 214035, Peoples R China
3.S China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510640, Guangdong, Peoples R China
4.Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Urumqi 830011, Peoples R China
推荐引用方式
GB/T 7714
Liu, Y ,Chen, HB ,Liu, YR ,et al. Low frequency noise and radiation response in the partially depleted SOI MOSFETs with ion implanted buried oxide[J]. CHINESE PHYSICS B,2015,24(8):1-6.
APA Liu, Y .,Chen, HB .,Liu, YR .,Wang, X .,En, YF .,...&Lu, YD .(2015).Low frequency noise and radiation response in the partially depleted SOI MOSFETs with ion implanted buried oxide.CHINESE PHYSICS B,24(8),1-6.
MLA Liu, Y ,et al."Low frequency noise and radiation response in the partially depleted SOI MOSFETs with ion implanted buried oxide".CHINESE PHYSICS B 24.8(2015):1-6.

入库方式: OAI收割

来源:新疆理化技术研究所

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