Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators
文献类型：期刊论文
| 作者 | Guo JG(郭建刚) ; Zhao YP(赵亚溥)
|
| 刊名 | Journal of Microelectromechanical Systems
 |
| 出版日期 | 2004 |
| 卷号 | 13期号:6页码:1027-1035 |
| 通讯作者邮箱 | yzhao@lnm.imech.ac.cn |
| ISSN号 | 1057-7157 |
| 通讯作者 | Guo, JG (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China. |
| 中文摘要 | The influence of van der Waals (vdW) and Casimir forces on the stability of the electrostatic torsional nanoelectromechanical systems (NEMS) actuators is analyzed in the paper. With the consideration of vdW and Casimir effects, the dependence of the critical tilting angle and pull-in voltage on the sizes of structure is investigated. And the influence of vdW torque is compared with that of Casimir torque. The modified coefficients of vdW and Casimir torques on the pull-in voltage are, respectively, calculated. When the gap is sufficiently small, pull-in can still take place with arbitrary small angle perturbation because of the action of vdW and Casimir torques even if there is not electrostatic torque. And the critical pull-in gaps for two cases are, respectively, derived. |
| 学科主题 | 力学 |
| 类目[WOS] | Engineering, Electrical & Electronic ; Engineering, Mechanical |
| 研究领域[WOS] | Engineering |
| 关键词[WOS] | PULL-IN ; DYNAMIC-BEHAVIOR ; MEMS ; MODEL ; MICROMIRRORS ; SWITCH |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000225515100017 |
| 公开日期 | 2007-06-15 ; 2007-12-05 ; 2009-06-23 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/17103]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Guo JG,Zhao YP. Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators[J]. Journal of Microelectromechanical Systems,2004,13(6):1027-1035. |
| APA | 郭建刚,&赵亚溥.(2004).Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators.Journal of Microelectromechanical Systems,13(6),1027-1035. |
| MLA | 郭建刚,et al."Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators".Journal of Microelectromechanical Systems 13.6(2004):1027-1035. |
入库方式： OAI收割
来源：力学研究所
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