Cleaning of carbon-contaminated optics using O-2/Ar plasma
文献类型：期刊论文
| 作者 | Zhang, YF; Luo, HX; Guo, Z; Zhen, XJ; Chen, M; Liu, JN |
| 刊名 | NUCLEAR SCIENCE AND TECHNIQUES
 |
| 出版日期 | 2017 |
| 卷号 | 28期号:9页码:- |
| 关键词 | In-situ Removal Efficiency Recovery Vacuum-ultraviolet Resuscitation Gratings Diamond Mirrors Region Range Films |
| ISSN号 | 1001-8042 |
| DOI | 10.1007/s41365-017-0274-z |
| 文献子类 | 期刊论文 |
| 英文摘要 | Cleaning of carbon-contaminated beamline optics was studied by RF plasma discharge process using O-2/Ar. Carbon-coated samples were prepared, and through their cleaning processes key parameters were determined, such as the optimal RF output power, mixing rates of O-2/Ar, and chamber vacuum. Considerations were made against possible adverse effects in cleaning the beamline optics, such as comparing the roughness of samples before and after cleaning, and possible detrimental kinetic effects on cable insulation. Under the cleaning parameters to clean the beamline optics, the thickness of removed carbon film and the change in beamline photon flux were analyzed. |
| WOS关键词 | IN-SITU REMOVAL ; EFFICIENCY RECOVERY ; VACUUM-ULTRAVIOLET ; RESUSCITATION ; GRATINGS ; DIAMOND ; MIRRORS ; REGION ; RANGE ; FILMS |
| 语种 | 英语 |
| WOS记录号 | WOS:000408853800008 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/28581]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2011-2017年 |
| 推荐引用方式 GB/T 7714 | Zhang, YF,Luo, HX,Guo, Z,et al. Cleaning of carbon-contaminated optics using O-2/Ar plasma[J]. NUCLEAR SCIENCE AND TECHNIQUES,2017,28(9):-. |
| APA | Zhang, YF,Luo, HX,Guo, Z,Zhen, XJ,Chen, M,&Liu, JN.(2017).Cleaning of carbon-contaminated optics using O-2/Ar plasma.NUCLEAR SCIENCE AND TECHNIQUES,28(9),-. |
| MLA | Zhang, YF,et al."Cleaning of carbon-contaminated optics using O-2/Ar plasma".NUCLEAR SCIENCE AND TECHNIQUES 28.9(2017):-. |
入库方式： OAI收割
来源：上海应用物理研究所
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