One-dimensional angular-measurement-based stitching interferometry
文献类型：期刊论文
| 作者 | Huang, L; Xue, JP; Ga, B; Idir, M |
| 刊名 | OPTICS EXPRESS
 |
| 出版日期 | 2018 |
| 卷号 | 26期号:8页码:9882-9892 |
| 关键词 | Ray Reflective Optics |
| ISSN号 | 1094-4087 |
| DOI | 10.1364/OE.26.009882 |
| 文献子类 | 期刊论文 |
| 英文摘要 | In this work, we present. one-dimensional stitching interferometry based on the angular measurement for high-precision mirror metrology. The tilt error introduced by the stage motion during the stitching process is measured by an extra angular measurement device. The local profile measured by the interferometer in a single field of view is corrected using the measured angle before the piston adjustment in the stitching process. Comparing to the classical software stitching technique, the angle measuring stitching technique is more reliable and accurate in profiling mirror surface at the nanometer level. Experimental results demonstrate the feasibility of the proposed stitching technique. Based on our measurements, the typical repeatability within 200 mm scanning range is 0.5 nm RMS or less. (C) 2018 Optical Society of America |
| 语种 | 英语 |
| WOS记录号 | WOS:000430337700044 |
| 源URL | [http://ir.sinap.ac.cn/handle/331007/29093]  |
| 专题 | 上海应用物理研究所_中科院上海应用物理研究所2011-2017年 |
| 作者单位 | 1.Huang, L 2.Xue, JP 3.Ga, B 4.Idir, M |
| 推荐引用方式 GB/T 7714 | Huang, L,Xue, JP,Ga, B,et al. One-dimensional angular-measurement-based stitching interferometry[J]. OPTICS EXPRESS,2018,26(8):9882-9892. |
| APA | Huang, L,Xue, JP,Ga, B,&Idir, M.(2018).One-dimensional angular-measurement-based stitching interferometry.OPTICS EXPRESS,26(8),9882-9892. |
| MLA | Huang, L,et al."One-dimensional angular-measurement-based stitching interferometry".OPTICS EXPRESS 26.8(2018):9882-9892. |
入库方式： OAI收割
来源：上海应用物理研究所
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