Monolithic Microlens VCSELs With High Beam Quality
文献类型：期刊论文
| 作者 | Huang, Y. W.; X. Zhang; J. W. Zhang; Y. Y. Xie; W. Hofmann; Y. Q. Ning and L. J. Wang |
| 刊名 | Ieee Photonics Journal
 |
| 出版日期 | 2017 |
| 卷号 | 9期号:4 |
| 英文摘要 | In this paper, we report on high beam quality vertical-cavity surface-emitting lasers (VCSELs) featuring a monolithically integrated aspherical microlens. This lens is fabricated by a one-step diffusion-limited wet etch process. VCSELs with microlenses with different curvature radius are designed, fabricated, and characterized, as well as reference VCSEL devices without the microlens. Significant improvement of beam divergence and single-mode performance are demonstrated in microlens VCSELs. The divergence angles of a conventional VCSEL are 14.5 degrees, 16.0 degrees, and 17.0 degrees (full width at D4 sigma) at 2 mA, 3 mA, and 4 mA, respectively, with a M-2 value measured to be 6.9 at 3 mA. Under the same current injection, the divergence angles of a comparable VCSEL with a micro-lens (curvature radius of 31.8 mu m) are reduced to 4.8 degrees, 5.5 degrees, and 5.7 degrees, respectively. The M-2 value of the lensed VCSEL is as low as 1.9 at 3 mA. |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/58953]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Huang, Y. W.,X. Zhang,J. W. Zhang,et al. Monolithic Microlens VCSELs With High Beam Quality[J]. Ieee Photonics Journal,2017,9(4). |
| APA | Huang, Y. W.,X. Zhang,J. W. Zhang,Y. Y. Xie,W. Hofmann,&Y. Q. Ning and L. J. Wang.(2017).Monolithic Microlens VCSELs With High Beam Quality.Ieee Photonics Journal,9(4). |
| MLA | Huang, Y. W.,et al."Monolithic Microlens VCSELs With High Beam Quality".Ieee Photonics Journal 9.4(2017). |
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