Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm
文献类型：期刊论文
| 作者 | Kuang, S. Q.; X. P. Gong and H. G. Yang |
| 刊名 | Journal of Applied Physics
 |
| 出版日期 | 2017 |
| 卷号 | 122期号:18 |
| 英文摘要 | In order to refine the layered structure of extreme ultraviolet multilayers, a multi-objective evolutionary algorithm which is post-hybridized with the standard Levenberg-Marquardt algorithm is applied to analyze the grazing incidence X-ray reflectivity (GIXR) and the normal incidence extreme ultraviolet reflectance (EUVR). In this procedure, the GIXR data and EUVR data are simultaneously fitted as two objectives, and the high sensitivities of these two sets of data to layer thicknesses and densities are combined. This set of mathematical procedures is conducive to obtain a more correct model of periodic multilayers which can simultaneously describe both GIXR and EUVR measurements. As a result, the layered structure of Mo/Si multilayers with a period of about 7.0 nm is obtained. Published by AIP Publishing. |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/58978]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Kuang, S. Q.,X. P. Gong and H. G. Yang. Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm[J]. Journal of Applied Physics,2017,122(18). |
| APA | Kuang, S. Q.,&X. P. Gong and H. G. Yang.(2017).Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm.Journal of Applied Physics,122(18). |
| MLA | Kuang, S. Q.,et al."Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm".Journal of Applied Physics 122.18(2017). |
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