Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances
文献类型：期刊论文
| 作者 | Liu, Z. W.; W. H. Li; Bayanheshig; X. T. Li; S. Jiang; Y. Song and Q. Lv |
| 刊名 | Scientific Reports
 |
| 出版日期 | 2017 |
| 卷号 | 7 |
| 英文摘要 | We designed a new system that eliminates deviations by correcting uncertainty in optical distance measurements in the laser two-color heterodyne interferometer. In simulations, eliminating the uncertainty from the atmosphere, the deviation in the uncertainty of the optical distance was 50 times greater with the two-color method than with the one-color method. Adding a correction arm reduces the deviation caused by the uncertainties in measured optical distances. The uncertainty in the measured path length is reduced to 20 nm over a path length of 1500 mm, giving a relative uncertainty of 1.34 x 10(-8). |
| 语种 | 英语 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/59111]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Liu, Z. W.,W. H. Li,Bayanheshig,et al. Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances[J]. Scientific Reports,2017,7. |
| APA | Liu, Z. W.,W. H. Li,Bayanheshig,X. T. Li,S. Jiang,&Y. Song and Q. Lv.(2017).Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances.Scientific Reports,7. |
| MLA | Liu, Z. W.,et al."Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances".Scientific Reports 7(2017). |
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