Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm
文献类型：期刊论文
| 作者 | Zhang, C.; J. Zhang; Y. Wang; S. Kuang and Y. Xie |
| 刊名 | Guangxue Xuebao/Acta Optica Sinica
 |
| 出版日期 | 2017 |
| 卷号 | 37期号:6 |
| 英文摘要 | A design approach of the theoretical film system with broad-angle extreme ultraviolet (EUV) multilayers coatings based on the real-coded quantum evolutionary algorithm (RQEA) is proposed. Based on the RQEA and the real-coded genetic algorithm (RGA), the theoretical design and analysis for Mo/Si multilayers coatings with broad angles is performed. It is found that the RQEA has obvious advantages of small population, high efficiency, and high accuracy, which makes the RQEA possess potential application value in the field of optical film design. In addition, the broadband Mo/Si multilayer coatings with reflectivity of up to 50% at incidence angle of 0-18 and at incident wavelength of 13.5 nm are designed. 2017, Chinese Lasers Press. All right reserved. |
| 语种 | 中文 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/59416]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Zhang, C.,J. Zhang,Y. Wang,et al. Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm[J]. Guangxue Xuebao/Acta Optica Sinica,2017,37(6). |
| APA | Zhang, C.,J. Zhang,Y. Wang,&S. Kuang and Y. Xie.(2017).Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm.Guangxue Xuebao/Acta Optica Sinica,37(6). |
| MLA | Zhang, C.,et al."Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm".Guangxue Xuebao/Acta Optica Sinica 37.6(2017). |
入库方式： OAI收割
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