Experiments on the mechanical behavior of anodically bonded interlayer of Pyrex Glass/Al/Si
文献类型：会议论文
| 作者 | Hu YQ1 ; Zhao YP(赵亚溥)2
|
| 出版日期 | 2013 |
| 会议日期 | June 16, 2013 - June 21, 2013 |
| 会议地点 | Beijing, China |
| 关键词 | Accelerometers Aluminum Glass Nanostructures Tensile strength Anodic bonding Bonding temperatures Dendritic nanostructures Intermediate layers MEMS/NEMS Micro accelerometers Micro scale structures Quasi static loading |
| 页码 | 2993-3002 |
| 英文摘要 | The MEMS/NEMS devices present an attractive prospect in many areas, especially in aviation and aerospace. Anodic bonding is one of the key technologies for the manufacturing of integrated 3-D structures of these devices. In this paper, based on experiments and detailed analysis, a systematic study will be made in depth for the mechanical behavior of anodically bonded interlayer within micro-scale structures. In accordance with a typical anodically bonded structure from one kind of MEMS micro accelerometer, a series of anodic bonding and mechanical tests were completed, for the behavior of the interlayer under quasi-static loading. The paper also presents the analysis of some important factors which influence the mechanical properties of the anodically bonded structure of Pyrex 7740 Glass/Al/Si. The metal oxidation reaction, dendritic nanostructures, and fractal patterns, which taking place at the bonding interface, were scrutinized. The experimental results demonstrate the thickness effect of the intermediate layer, and that the bonding tensile strength increases with the bonding temperature and voltage, but it decreases with the increase of the thickness of Al intermediate layer. The formation of the nanostructures in the bonding interlayer is also helpful to enhance the anodic bonding strength. Copyright © (2013) by International Conference on Fracture. |
| 会议录 | 13th International Conference on Fracture 2013, ICF 2013
 |
| 语种 | 英语 |
| ISBN号 | 9781629933696 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/77980]  |
| 专题 | 力学研究所_非线性力学国家重点实验室 |
| 作者单位 | 1.College of Civil Aviation and Flight, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China; 2.State Key Laboratory of Nonlinear Mechanics (LNM), Chinese Academy of Sciences, Institute of Mechanics, Beijing 100190, China |
| 推荐引用方式 GB/T 7714 | Hu YQ,Zhao YP. Experiments on the mechanical behavior of anodically bonded interlayer of Pyrex Glass/Al/Si[C]. 见:. Beijing, China. June 16, 2013 - June 21, 2013. |
入库方式： OAI收割
来源：力学研究所
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