Design and simulation of large field plate lithography lens
文献类型：期刊论文
| 作者 | Deng, Chao1; Xing, Tingwen1; Lin, Wumei1; Zhu, Xianchang1 |
| 刊名 | Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
 |
| 出版日期 | 2016 |
| 卷号 | 9685页码:96850V |
| 关键词 | Fits And Tolerances Lithography Manufacture Materials Testing Optical Design Optical Devices Optical Systems |
| ISSN号 | 0277-786X |
| DOI | 10.1117/12.2245717 |
| 文献子类 | C |
| 英文摘要 | Because industry demand for LED,LCD panel continues to increase, the high yield of micron-scale resolution lithography is increasingly prominent for manufacturers, which requires the field of lithography objective lens becomes larger. This paper designed a lithography lens with large field, whose effective image side field will reach to 132 × 132mm.Subsequently, the tolerance was analysed by simulation for the optical system. Finally, it is proved that the design meets the requirements of micron-scale resolution. © 2016 SPIE. |
| 语种 | 英语 |
| WOS记录号 | WOS:000387429600031 |
| 资助机构 | Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS) |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8458]  |
| 专题 | 超精密总体部 |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 2.610209, China |
| 推荐引用方式 GB/T 7714 | Deng, Chao,Xing, Tingwen,Lin, Wumei,et al. Design and simulation of large field plate lithography lens[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,2016,9685:96850V. |
| APA | Deng, Chao,Xing, Tingwen,Lin, Wumei,&Zhu, Xianchang.(2016).Design and simulation of large field plate lithography lens.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,9685,96850V. |
| MLA | Deng, Chao,et al."Design and simulation of large field plate lithography lens".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials 9685(2016):96850V. |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。