Evaluating surface repeatability for interferometric measurement: A comparative study
文献类型：期刊论文
| 作者 | Quan, Haiyang1,2; Xi, Hou1; Fan, Wu1 |
| 刊名 | Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
 |
| 出版日期 | 2016 |
| 卷号 | 9684页码:96842M |
| 关键词 | Manufacture Optical Testing Pixels Statistics Uncertainty Analysis |
| ISSN号 | 0277-786X |
| DOI | 10.1117/12.2243301 |
| 文献子类 | C |
| 英文摘要 | The result of an interferometric surface figure measurement is a height map, from which single parametric descriptors (for example the RMS) or residual maps are the most commonly used methods for determining the measurement repeatability. An alternate technique based on a standard deviation matrix is used to better describe the variation among successive measurements. A standard deviation matrix is acquired by computing standard deviation of the height map pixel by pixel. Only one standard deviation matrix can provide a spatial description of the repeatability as well as parametric descriptors (for example the mean) of the standard deviation matrix. Comparative study on the evaluation of measurement repeatability among different methods is shown by both simulation and experiment. It seems that the standard deviation matrix method is more valid to detect the variation than other techniques in the measurement of surface figure. © 2016 SPIE. |
| 语种 | 英语 |
| WOS记录号 | WOS:000387429500094 |
| 资助机构 | Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS) |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8460]  |
| 专题 | 超精密总体部 |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 2.610209, China 3.University of Chinese Academy of Sciences, Beijing 4.100049, China |
| 推荐引用方式 GB/T 7714 | Quan, Haiyang,Xi, Hou,Fan, Wu. Evaluating surface repeatability for interferometric measurement: A comparative study[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:96842M. |
| APA | Quan, Haiyang,Xi, Hou,&Fan, Wu.(2016).Evaluating surface repeatability for interferometric measurement: A comparative study.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,96842M. |
| MLA | Quan, Haiyang,et al."Evaluating surface repeatability for interferometric measurement: A comparative study".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):96842M. |
入库方式： OAI收割
来源：光电技术研究所
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