Analysis of absolute flatness testing in sub-stitching interferometer
文献类型：期刊论文
| 作者 | Jia, Xin1; Xu, Fuchao1; Xie, Weimin1; Xing, Tingwen1 |
| 刊名 | Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
 |
| 出版日期 | 2016 |
| 卷号 | 9684页码:968438 |
| 关键词 | Atmospheric Pressure Clean Rooms Errors Humidity Control Interferometers Manufacture Measurements Optical Testing |
| ISSN号 | 0277-786X |
| DOI | 10.1117/12.2243462 |
| 文献子类 | C |
| 英文摘要 | Sub-Aperture stitching is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. The test accuracy can be achieved by removing the error of reference surface by the absolute testing method. When the testing accuracy (repeatability and reproducibility) is close to 1nm, in addition to the reference surface, other factors will also affect the measuring accuracy such as environment, zoom magnification, stitching precision, tooling and fixture, the characteristics of optical materials and so on. In the thousand level cleanroom, we establish a good environment system. Long time stability, temperature controlled at 22°±0.02°.The humidity and noise are controlled in a certain range. We establish a stitching system in the clean room. The vibration testing system is used to test the vibration. The air pressure testing system is also used. In the motion system, we control the tilt error no more than 4 second to reduce the error. The angle error can be tested by the autocollimator and double grating reading head. © 2016 SPIE. |
| 语种 | 英语 |
| WOS记录号 | WOS:000387429500116 |
| 资助机构 | Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS) |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8461]  |
| 专题 | 超精密总体部 |
| 作者单位 | 1.Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 2.610209, China |
| 推荐引用方式 GB/T 7714 | Jia, Xin,Xu, Fuchao,Xie, Weimin,et al. Analysis of absolute flatness testing in sub-stitching interferometer[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:968438. |
| APA | Jia, Xin,Xu, Fuchao,Xie, Weimin,&Xing, Tingwen.(2016).Analysis of absolute flatness testing in sub-stitching interferometer.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,968438. |
| MLA | Jia, Xin,et al."Analysis of absolute flatness testing in sub-stitching interferometer".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):968438. |
入库方式： OAI收割
来源：光电技术研究所
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