Modeling and experimental study of plasmonic lens imaging with resolution enhanced methods
文献类型：期刊论文
| 作者 | Zhao, Zeyu1; Luo, Yunfei1; Yao, Na1; Zhang, Wei1; Wang, Changtao1; Gao, Ping1; Zhao, Chengwei1; Pu, Mingbo1; Luo, Xiangang1 |
| 刊名 | Optics Express
 |
| 出版日期 | 2016 |
| 卷号 | 24期号:24页码:27115-27126 |
| ISSN号 | 1094-4088 |
| 关键词 | Electric Fields Masks Nanolithography Numerical Methods Optical Transfer Function Plasmons Surface Plasmon Resonance |
| DOI | 10.1364/OE.24.027115 |
| 文献子类 | J |
| 英文摘要 | Plasmonic lens imaging with some resolution enhancement methods are investigated in this paper, mainly by physical modeling and numerical simulations. The imaging model is based on the refined optical transfer function with extra reflection in imaging space and measured in variant magnetic and electric field components. The influences of structured light illumination and mask patterns' modifications are considered as well. As experimental demonstrations, L-shaped slits pattern with a half-pitch of 60 nm is successfully imaged with 50 nm air distance, by using plasmonic cavity lens lithography and off-axis illumination with 365 nm wavelength light. This study is believed to provide the model and methods for the design of high resolution plasmonic lens employed in nano lithography and optical storage etc. © 2016 Optical Society of America. |
| 语种 | 英语 |
| WOS记录号 | WOS:000389468200007 |
| 资助机构 | 974 Program of China [2013CBA01700] ; National Natural Science Funds [61138002, 61177013, 61575204] |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8476]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu 2.610209, China |
| 推荐引用方式 GB/T 7714 | Zhao, Zeyu,Luo, Yunfei,Yao, Na,et al. Modeling and experimental study of plasmonic lens imaging with resolution enhanced methods[J]. Optics Express,2016,24(24):27115-27126. |
| APA | Zhao, Zeyu.,Luo, Yunfei.,Yao, Na.,Zhang, Wei.,Wang, Changtao.,...&Luo, Xiangang.(2016).Modeling and experimental study of plasmonic lens imaging with resolution enhanced methods.Optics Express,24(24),27115-27126. |
| MLA | Zhao, Zeyu,et al."Modeling and experimental study of plasmonic lens imaging with resolution enhanced methods".Optics Express 24.24(2016):27115-27126. |
入库方式： OAI收割
来源：光电技术研究所
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