Electrostatic repulsive out-of-plane actuator using conductive substrate
文献类型：期刊论文
| 作者 | Wang, Weimin; Wang, Qiang; Ren, Hao; Ma, Wenying; Qiu, Chuankai; Chen, Zexiang; Fan, Bin |
| 刊名 | SCIENTIFIC REPORTS
 |
| 出版日期 | 2016 |
| 卷号 | 6 |
| 关键词 | Adaptive Optics Micromirror Translation Toolbox Matlab |
| ISSN号 | 2045-2322 |
| DOI | 10.1038/srep35118 |
| 文献子类 | J |
| 英文摘要 | A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer repulsive actuators, i.e., fabrication requirements and fill factor. A theoretical model for the proposed actuator is developed and solved through the numerical calculation of Schwarz-Christoffel mapping. Theoretical and simulated results show that the pseudo-three-layer actuator offers higher performance than the two-layer and three-layer actuators with regard to the two most important characteristics of actuators, namely, driving force and theoretical stroke. Given that the pseudo-three-layer actuator structure is compatible with both the parallel-plate actuators and these two types of repulsive actuators, a 19-element two-layer repulsive actuated deformable mirror is operated in pseudo-three-layer electrical connection mode. Theoretical and experimental results demonstrate that the pseudo-three-layer mode produces a larger displacement of 0-4.5 mu m for a dc driving voltage of 0-100 V, when compared with that in two-layer mode. |
| 语种 | 英语 |
| WOS记录号 | WOS:000392013500001 |
| 资助机构 | National Natural Science Foundation of China [11403029, 61071027] ; Youth Innovation Promotion Association CAS [2014346] |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8482]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1.[Wang, Weimin 2.Wang, Qiang 3.Qiu, Chuankai 4.Fan, Bin] Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China 5.[Ren, Hao] Arizona State Univ, Sch Elect Comp & Energy Engn, Tempe, AZ 85281 USA 6.[Ma, Wenying] Chengdu Univ Informat Technol, Coll Commun Engn, Chengdu 610225, Peoples R China 7.[Chen, Zexiang] Univ Elect Sci & Technol China, Sch Optoelect Informat, Chengdu 610054, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Weimin,Wang, Qiang,Ren, Hao,et al. Electrostatic repulsive out-of-plane actuator using conductive substrate[J]. SCIENTIFIC REPORTS,2016,6. |
| APA | Wang, Weimin.,Wang, Qiang.,Ren, Hao.,Ma, Wenying.,Qiu, Chuankai.,...&Fan, Bin.(2016).Electrostatic repulsive out-of-plane actuator using conductive substrate.SCIENTIFIC REPORTS,6. |
| MLA | Wang, Weimin,et al."Electrostatic repulsive out-of-plane actuator using conductive substrate".SCIENTIFIC REPORTS 6(2016). |
入库方式： OAI收割
来源：光电技术研究所
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