Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene
文献类型：期刊论文
| 作者 | Zhang, Man1; Deng, Qiling1; Shi, Lifang1; Pang, Hui1; Cao, Axiu1; Hu, Song1 |
| 刊名 | Journal of Nanoscience and Nanotechnology
 |
| 出版日期 | 2016 |
| 卷号 | 16期号:12页码:12316-12320 |
| 关键词 | Curing Fabrication Microchannels Molds Nanoimprint Lithography Nanostructures Pulse Width Modulation Substrates Synthesis (Chemical) |
| ISSN号 | 1533-4880 |
| DOI | 10.1166/jnn.2016.12970 |
| 文献子类 | J |
| 英文摘要 | We proposed a method for fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on UV-curable thiol-ene polymer and via soft lithography which consisted of rigid structure layer and flexible substrate. An elastic film was firstly prepared as the flexible substrate and the thiol-ene prepolymer was then spin-coated onto the master mold with nanostructures. The flexible film was imprinted against the resistant layer to make a conformal contact. The thiol-ene formed a cross-linked polymer network after UV light treatment via "click chemistry" at ambient conditions and without inhabitation from oxygen or moisture. The hybrid stamp was achieved after releasing the mold. The rigid thiol-ene nanostructure had high-resolution due to excellent properties. The hybrid stamps, composed of rigid cross-linked thiol-ene features with sub-100 nm resolution on an elastic poly(dimethylsiloxane) (PDMS) substrate, were fabricated based on the new method. Copyright © 2016 American Scientific Publishers All rights reserved. |
| 语种 | 英语 |
| WOS记录号 | WOS:000387279100031 |
| 资助机构 | National Nature Science Foundation of China [11174281, 61275061, 11074251] |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8499]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 2.610209, China |
| 推荐引用方式 GB/T 7714 | Zhang, Man,Deng, Qiling,Shi, Lifang,et al. Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene[J]. Journal of Nanoscience and Nanotechnology,2016,16(12):12316-12320. |
| APA | Zhang, Man,Deng, Qiling,Shi, Lifang,Pang, Hui,Cao, Axiu,&Hu, Song.(2016).Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene.Journal of Nanoscience and Nanotechnology,16(12),12316-12320. |
| MLA | Zhang, Man,et al."Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene".Journal of Nanoscience and Nanotechnology 16.12(2016):12316-12320. |
入库方式： OAI收割
来源：光电技术研究所
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