Topography measurement of micro structure by modulation-based method
文献类型：期刊论文
| 作者 | Zhou, Yi1,2; Tang, Yan1; Liu, Junbo1; Deng, Qinyuan1,2; Cheng, Yiguang1; Hu, Song1 |
| 刊名 | Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
 |
| 出版日期 | 2016 |
| 卷号 | 9685页码:968505 |
| 关键词 | Interferometry Light Sources Manufacture Materials Testing Microstructure Optical Devices Pixels Surface Measurement Topography |
| ISSN号 | 0277-786X |
| DOI | 10.1117/12.2243599 |
| 文献子类 | C |
| 英文摘要 | Dimensional metrology for micro structure plays an important role in addressing quality issues and observing the performance of micro-fabricated products. Different from the traditional white-light interferometry approach, the modulation-based method is expected to measure topography of micro structure by the obtained modulation of each interferometry image. Through seeking the maximum modulation of every pixel respectively in Z direction, the method could obtain the corresponding height of individual pixel and finally get topography of the structure. Owing to the characteristic of modulation, the proposed method which is not influenced by the change of background light intensity caused by instable light source and different reflection index of the structure could be widely applied with high stability. The paper both illustrates the principle of this novel method and conducts the experiment to verify the feasibility. © 2016 SPIE. |
| 语种 | 英语 |
| WOS记录号 | WOS:000387429600005 |
| 资助机构 | Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS) |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8504]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 2.610209, China 3.University of Chinese Academy of Sciences, Beijing 4.100049, China |
| 推荐引用方式 GB/T 7714 | Zhou, Yi,Tang, Yan,Liu, Junbo,et al. Topography measurement of micro structure by modulation-based method[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,2016,9685:968505. |
| APA | Zhou, Yi,Tang, Yan,Liu, Junbo,Deng, Qinyuan,Cheng, Yiguang,&Hu, Song.(2016).Topography measurement of micro structure by modulation-based method.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,9685,968505. |
| MLA | Zhou, Yi,et al."Topography measurement of micro structure by modulation-based method".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials 9685(2016):968505. |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。