Thickness measurement of transparent film by white-light interferometry
文献类型：期刊论文
| 作者 | Deng, Qinyuan1,2; Zhou, Yi1,2; Liu, Junbo1; Yao, Jingwei1,2; Hu, Song1 |
| 刊名 | Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
 |
| 出版日期 | 2016 |
| 卷号 | 9685页码:968506 |
| 关键词 | Film Thickness Manufacture Materials Testing Optical Devices Optical Films Reflection Reflectometers Structural Design Thickness Gages Thickness Measurement Thin Films |
| ISSN号 | 0277-786X |
| DOI | 10.1117/12.2243601 |
| 文献子类 | C |
| 英文摘要 | White-light scanning interferometry plays an important role in precise profile metrology of microstructure. However, applying this approach may also be limited because of the optical reflection behavior of the surface. While there is a thin film on the surface, the reflection behavior of top and bottom of the thin-film will cause severer phase errors. Recently, the method by combining both reflectometry and white-light scanning interferometry is proposed to measure the film thickness and surface profile. This article firstly explains the principle of the proposed method and then verifies the feasibility of the thickness-measurement method for transparent film on a Silicon surface. Both of the algorithm and the experiment system have been optimized to measure the film thickness with high precision. © 2016 SPIE. |
| 语种 | 英语 |
| WOS记录号 | WOS:000387429600006 |
| 资助机构 | Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS) |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8505]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 2.610209, China 3.University of Chinese Academy of Sciences, Beijing 4.100049, China |
| 推荐引用方式 GB/T 7714 | Deng, Qinyuan,Zhou, Yi,Liu, Junbo,et al. Thickness measurement of transparent film by white-light interferometry[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,2016,9685:968506. |
| APA | Deng, Qinyuan,Zhou, Yi,Liu, Junbo,Yao, Jingwei,&Hu, Song.(2016).Thickness measurement of transparent film by white-light interferometry.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,9685,968506. |
| MLA | Deng, Qinyuan,et al."Thickness measurement of transparent film by white-light interferometry".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials 9685(2016):968506. |
入库方式： OAI收割
来源：光电技术研究所
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