High precision locating control system based on VCM for Talbot lithography
文献类型：期刊论文
| 作者 | Yao, Jingwei1,2; Zhao, Lixin1,2; Deng, Qian1,2; Hu, Song1,2 |
| 刊名 | Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
 |
| 出版日期 | 2016 |
| 卷号 | 9685页码:96850L |
| 关键词 | Control Systems Digital Signal Processors Efficiency Feedback Lithography Manufacture Materials Testing Optical Devices Signal Processing Structural Design Three Term Control Systems |
| ISSN号 | 0277-786X |
| DOI | 10.1117/12.2243616 |
| 文献子类 | C |
| 英文摘要 | Aiming at the high precision and efficiency requirements of Z-direction locating in Talbot lithography, a control system based on Voice Coil Motor (VCM) was designed. In this paper, we built a math model of VCM and its moving characteristic was analyzed. A double-closed loop control strategy including position loop and current loop were accomplished. The current loop was implemented by driver, in order to achieve the rapid follow of the system current. The position loop was completed by the digital signal processor (DSP) and the position feedback was achieved by high precision linear scales. Feed forward control and position feedback Proportion Integration Differentiation (PID) control were applied in order to compensate for dynamic lag and improve the response speed of the system. And the high precision and efficiency of the system were verified by simulation and experiments. The results demonstrated that the performance of Z-direction gantry was obviously improved, having high precision, quick responses, strong real-time and easily to expend for higher precision. © 2016 SPIE. |
| 语种 | 英语 |
| WOS记录号 | WOS:000387429600021 |
| 资助机构 | Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS) |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8506]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.Institution of Optics and Electronics, Chinese Academy of Sciences, Chengdu 2.610209, China 3.University of Chinese Academy of Sciences, Beijing 4.100039, China |
| 推荐引用方式 GB/T 7714 | Yao, Jingwei,Zhao, Lixin,Deng, Qian,et al. High precision locating control system based on VCM for Talbot lithography[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,2016,9685:96850L. |
| APA | Yao, Jingwei,Zhao, Lixin,Deng, Qian,&Hu, Song.(2016).High precision locating control system based on VCM for Talbot lithography.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,9685,96850L. |
| MLA | Yao, Jingwei,et al."High precision locating control system based on VCM for Talbot lithography".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials 9685(2016):96850L. |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。