Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters
文献类型：期刊论文
| 作者 | Xu, Lichao1,2; Wan, Yongjian1; Liu, Haitao1; Wang, Jia1 |
| 刊名 | Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
 |
| 出版日期 | 2016 |
| 卷号 | 9683页码:96831W |
| 关键词 | Manufacture |
| ISSN号 | 0277-786X |
| DOI | 10.1117/12.2243613 |
| 文献子类 | C |
| 英文摘要 | Smoothing is a convenient and efficient way to restrain middle spatial frequency (MSF) errors. Based on the experience, lap diameter, rotation speed, lap pressure and the hardness of pitch layer are important to correcting MSF errors. Therefore, nine groups of experiments are designed with the orthogonal method to confirm the significance of the above parameters. Based on the Zhang's model, PV (Peak and Valley) and RMS (Root Mean Square) versus processing cycles are analyzed before and after smoothing. At the same time, the smoothing limit and smoothing rate for different parameters to correct MSF errors are analyzed. Combined with the deviation analysis, we distinguish between dominant and subordinate parameters, and find out the optimal combination and law of various parameters, so as to guide the further research and fabrication. © 2016 SPIE. |
| 语种 | 英语 |
| WOS记录号 | WOS:000387745800067 |
| 资助机构 | Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS) |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8521]  |
| 专题 | 光电技术研究所_先光中心 |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 2.610209, China 3.University of Chinese Academy of Sciences, Beijing 4.100049, China |
| 推荐引用方式 GB/T 7714 | Xu, Lichao,Wan, Yongjian,Liu, Haitao,et al. Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies,2016,9683:96831W. |
| APA | Xu, Lichao,Wan, Yongjian,Liu, Haitao,&Wang, Jia.(2016).Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies,9683,96831W. |
| MLA | Xu, Lichao,et al."Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies 9683(2016):96831W. |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。