Analysis of adjustment error in aspheric null testing with CGH
文献类型：期刊论文
| 作者 | He, Yiwei1,2; Xi, Hou1; Chen, Qiang1; Li, Chaoqiang1; Zhu, Xiaoqiang1; Song, Weihong1 |
| 刊名 | Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
 |
| 出版日期 | 2016 |
| 卷号 | 9684页码:968444 |
| 关键词 | Aspherics Electron Holography Errors Holograms Lithography Manufacture Optical Testing Wavefronts |
| ISSN号 | 0277-786X |
| DOI | 10.1117/12.2243226 |
| 文献子类 | C |
| 英文摘要 | Generally, in order to gain high accuracy in aspheric testing, a piece of high-quality CGH (computer generated hologram) is inserted behind transmission sphere to generate specified wave-front to match aspheric part. According to the difference in function, the CGH is divided into 2 parts: The center region, called as testing hologram, is used to generate specified aspheric wave-front; the outer ring, called as alignment hologram, is used to align the location of CGH behind transmission sphere. Although alignment hologram is used, there is still some adjustment error from both CGH and aspheric part, such as tilt, eccentricity and defocus. Here we will stimulate the effect of these error sources on the accuracy that is rms after the piston, tilt and power are removed, when testing a specified aspheric part. It is easy to conclude that the total measurement error is about 2 nm and the defocus of CGH contributes most. © 2016 SPIE. |
| 语种 | 英语 |
| WOS记录号 | WOS:000387429500148 |
| 资助机构 | Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS) |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8531]  |
| 专题 | 光电技术研究所_先光中心 |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 2.610209, China 3.University of Chinese Academy of Sciences, Beijing 4.100039, China |
| 推荐引用方式 GB/T 7714 | He, Yiwei,Xi, Hou,Chen, Qiang,et al. Analysis of adjustment error in aspheric null testing with CGH[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:968444. |
| APA | He, Yiwei,Xi, Hou,Chen, Qiang,Li, Chaoqiang,Zhu, Xiaoqiang,&Song, Weihong.(2016).Analysis of adjustment error in aspheric null testing with CGH.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,968444. |
| MLA | He, Yiwei,et al."Analysis of adjustment error in aspheric null testing with CGH".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):968444. |
入库方式： OAI收割
来源：光电技术研究所
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