A surface irregularity compensation alignment method for all-reflective optical system
文献类型：期刊论文
| 作者 | Li, Lian1; Zhang, Ming1; Ma, Tianmeng1 |
| 刊名 | Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
 |
| 出版日期 | 2016 |
| 卷号 | 9684页码:968431 |
| 关键词 | Alignment Image Quality Manufacture Mirrors Numerical Methods Optical Testing |
| ISSN号 | 0277-786X |
| DOI | 10.1117/12.2244939 |
| 文献子类 | C |
| 英文摘要 | Surface irregularity of optical elements is one of the errors caused in manufacturing process, which has a bad influence on optical system image quality. This image quality deterioration can't be neglected especially in some all-reflective optical systems. A method by rotating the mirrors for compensating the surface irregularity is put forward in the paper. Firstly, the surface irregularity of all the mirrors is analyzed and the most closely matched mirrors are chosen for one set of system alignment. Then, the wavefront characteristic of optical system and the surface irregularity of each mirror represented by Zernike polynomial are studied, and the relationship between them is analyzed. The calculation of the rotate angle is described in detail. A numerical simulation of the method has been performed for two sets of three-mirror optical system to verify the ability and accuracy of the method. The results show that the astigmatism of the optical system caused by the surface irregularity can be decreased and the image quality of both the two systems can be improved effectively. The method is especially suitable for multiple sets of optical systems alignment. © 2016 SPIE. |
| 语种 | 英语 |
| WOS记录号 | WOS:000387429500109 |
| 资助机构 | Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS) |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8566]  |
| 专题 | 光电技术研究所_总装中心 |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Science, Chengdu 2.610209, China |
| 推荐引用方式 GB/T 7714 | Li, Lian,Zhang, Ming,Ma, Tianmeng. A surface irregularity compensation alignment method for all-reflective optical system[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:968431. |
| APA | Li, Lian,Zhang, Ming,&Ma, Tianmeng.(2016).A surface irregularity compensation alignment method for all-reflective optical system.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,968431. |
| MLA | Li, Lian,et al."A surface irregularity compensation alignment method for all-reflective optical system".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):968431. |
入库方式： OAI收割
来源：光电技术研究所
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