Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry
文献类型：期刊论文
| 作者 | Zhou, Yi1,2; Tang, Yan1; Zhu, Jiangping3; Deng, Qinyuan1,2; Yang, Yong1; Zhao, Lixin1; Hu, Song1 |
| 刊名 | Applied Optics
 |
| 出版日期 | 2017 |
| 卷号 | 56期号:8页码:2301-2306 |
| 关键词 | Microstructure |
| ISSN号 | 1559-128X |
| 英文摘要 | Broadband light interferometry, which is a well-developed method for surface profiling, has been applied with great success in the past years. Conventional multi-wavelength interferometric surface profilers mostly utilize the light irradiance to locate the zero fringe order, but the accuracy and stability can be negatively influenced by intensity fluctuations and external light disturbance, which is a serious problem. In this paper we discuss a hybrid technique combining light intensity and spectral modulation to determine zero optical path difference in which the light instability can be effectively suppressed. Additionally, the phase evaluation at each pixel will provide a high vertical resolution to obtain the characterization of the micro structure. The hybrid-interference method will not only improve the sensitivity of the measurement system but also level up the robustness and stability. Both simulation and experiment on a micro-dome structure have been presented to verify the effectiveness. Furthermore, the proposed method may be promising to replace the previously intensity-based method, especially in a complex application environment. © 2017 Optical Society of America. |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8776]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China; 3.Institute of Image and Graphics, School of Computer Science and Technology, Sichuan University, Chengdu; 610064, China |
| 推荐引用方式 GB/T 7714 | Zhou, Yi,Tang, Yan,Zhu, Jiangping,et al. Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry[J]. Applied Optics,2017,56(8):2301-2306. |
| APA | Zhou, Yi.,Tang, Yan.,Zhu, Jiangping.,Deng, Qinyuan.,Yang, Yong.,...&Hu, Song.(2017).Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry.Applied Optics,56(8),2301-2306. |
| MLA | Zhou, Yi,et al."Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry".Applied Optics 56.8(2017):2301-2306. |
入库方式： OAI收割
来源：光电技术研究所
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