Modeling near-null testing method of a freeform surface with a deformable mirror compensator
文献类型:期刊论文
作者 | He, Yiwei1,2,3; Huang, Lei4; Hou, Xi1; Fan, Wu1; Liang, Rongguang2 |
刊名 | Applied Optics
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出版日期 | 2017 |
卷号 | 56期号:33页码:9132-9138 |
关键词 | Constrained optimization - Deformation - Fits and tolerances - Mirrors - Testing |
ISSN号 | 1559-128X |
英文摘要 | We present and analyze a new measurement method of freeform surfaces with a deformable mirror (DM), which functions as a wavefront compensator. We discuss the maximum slope compensation of a DM in the first-order approximation and derive how to calculate the ideal DM form. A constrained optimization procedure is conducted to ensure the actual DM form fits the ideal DM form as closely as possible. To demonstrate the feasibility and understand the measurable range of our method, we evaluate freeform surfaces with a single Zernike term, the first 36 random Zernike terms, and 230 random Zernike terms. A tolerance analysis of the DM position is carried out to show the effect of the tilt and the decenter of the DM on the measurement accuracy. Our studies show that the proposed system is very flexible for freeform surface metrology. © 2017 Optical Society of America. |
语种 | 英语 |
源URL | [http://ir.ioe.ac.cn/handle/181551/8780] ![]() |
专题 | 光电技术研究所_先光中心 |
作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China; 2.College of Optical Sciences, University of Arizona, Tucson; AZ; 85721, United States; 3.University of Chinese Academy of Sciences, Beijing; 100039, China; 4.Center for Photonics and Electronics, Department of Precision Instruments, Tsinghua University, Beijing; 100084, China |
推荐引用方式 GB/T 7714 | He, Yiwei,Huang, Lei,Hou, Xi,et al. Modeling near-null testing method of a freeform surface with a deformable mirror compensator[J]. Applied Optics,2017,56(33):9132-9138. |
APA | He, Yiwei,Huang, Lei,Hou, Xi,Fan, Wu,&Liang, Rongguang.(2017).Modeling near-null testing method of a freeform surface with a deformable mirror compensator.Applied Optics,56(33),9132-9138. |
MLA | He, Yiwei,et al."Modeling near-null testing method of a freeform surface with a deformable mirror compensator".Applied Optics 56.33(2017):9132-9138. |
入库方式: OAI收割
来源:光电技术研究所
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