The effects of profile errors of microlens surfaces on laser beam homogenization
文献类型：期刊论文
| 作者 | Cao, Axiu1,2; Pang, Hui1; Wang, Jiazhou1,2; Zhang, Man1; Chen, Jian2,3; Shi, Lifang1; Deng, Qiling1; Hu, Song1 |
| 刊名 | Micromachines
 |
| 出版日期 | 2017 |
| 卷号 | 8期号:2页码:50 |
| 关键词 | Errors - Gears - Laser beams - Microanalysis - Microfabrication - Microlenses - Microoptics - Optical instrument lenses |
| ISSN号 | 2072-666X |
| 英文摘要 | Microlens arrays (MLAs) are key optical components in laser beam homogenization. However, due to imperfect surface profiles resulting from microfabrication, the functionalities of MLAs in beam modulation could be compromised to some extent. In order to address this issue, the effects of surface profile mismatches between ideal and fabricated MLAs on beam homogenization were analyzed. Four types of surface profile errors of MLAs were modeled theoretically and numerical simulations were conducted to quantitatively estimate the effects of these profile errors on beam homogenization. In addition, experiments were conducted to validate the simulation results, revealing that profile errors leading to optical deviations located on the apex of microlenses affected beam homogenization less than deviations located further away from it. This study can provide references for the further applications of MLAs in beam homogenization. © 2017 by the authors. |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8840]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China; 3.State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing; 100190, China |
| 推荐引用方式 GB/T 7714 | Cao, Axiu,Pang, Hui,Wang, Jiazhou,et al. The effects of profile errors of microlens surfaces on laser beam homogenization[J]. Micromachines,2017,8(2):50. |
| APA | Cao, Axiu.,Pang, Hui.,Wang, Jiazhou.,Zhang, Man.,Chen, Jian.,...&Hu, Song.(2017).The effects of profile errors of microlens surfaces on laser beam homogenization.Micromachines,8(2),50. |
| MLA | Cao, Axiu,et al."The effects of profile errors of microlens surfaces on laser beam homogenization".Micromachines 8.2(2017):50. |
入库方式： OAI收割
来源：光电技术研究所
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