Analysis of spurious diffraction orders of computer-generated hologram in symmetric aspheric metrology
文献类型：期刊论文
| 作者 | He, Yiwei1,2,3; Hou, Xi1; Wu, Fan1; Ma, Xinxue4; Liang, Rongguang2 |
| 刊名 | Optics Express
 |
| 出版日期 | 2017 |
| 卷号 | 25期号:17页码:20556-20572 |
| 关键词 | Aspherics - Diffraction - Electron holography - Holograms - Imaging systems - Units of measurement |
| ISSN号 | 1094-4087 |
| 英文摘要 | Computer-generated hologram (CGH) has been widely used as a wavefront compensator in symmetric aspheric metrology. As a diffractive element, it generates different diffraction orders, but only the 1st-order diffraction is used to test aspheric surface. The light from spurious diffraction orders (SDO) will produce many high-frequency fringes in interferogram and reduce measurement accuracy. In this paper, we regard the CGH null system as an imaging system and develop an aberration model in Seidel formalism to analyze the SDO. This model has the advantage to address the difference between the SDO (k1, k2) and (k2, k1). We consider the effect of the pupil distortion so that our model can analyze the SDO with a large pupil distortion. We derive the condition to ensure the 2nd-order and 4th-order aberrations have the same sign and calculate the minimum defocused distance (power carrier frequency) of CGH. According to the marginal-ray heights (h1and h3) on the CGH in the first and second passes, we determine the condition that the SDO covers the whole CGH in the second pass. We analyze the SDO of 4 CGH designs and compare the results from our aberration model with these from real ray trace. These results validate that our aberration model is feasible whether the aspheric part is convex or concave and whether CGH is inside or outside the focus of the transmission sphere. ©2017 Optical Society of America. |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8873]  |
| 专题 | 光电技术研究所_先光中心 |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China; 2.College of Optical Sciences, University of Arizona, Tucson; AZ; 85721, United States; 3.University of Chinese Academy of Sciences, Beijing; 100039, China; 4.Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun; 130033, China |
| 推荐引用方式 GB/T 7714 | He, Yiwei,Hou, Xi,Wu, Fan,et al. Analysis of spurious diffraction orders of computer-generated hologram in symmetric aspheric metrology[J]. Optics Express,2017,25(17):20556-20572. |
| APA | He, Yiwei,Hou, Xi,Wu, Fan,Ma, Xinxue,&Liang, Rongguang.(2017).Analysis of spurious diffraction orders of computer-generated hologram in symmetric aspheric metrology.Optics Express,25(17),20556-20572. |
| MLA | He, Yiwei,et al."Analysis of spurious diffraction orders of computer-generated hologram in symmetric aspheric metrology".Optics Express 25.17(2017):20556-20572. |
入库方式： OAI收割
来源：光电技术研究所
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