Study on defects in ZnS/YbF3infrared coatings on silicon substrates
文献类型：期刊论文
| 作者 | Zhang, Yinhua1,2; Xiong, Shengming1; Huang, Wei1 |
| 刊名 | Surface and Coatings Technology
 |
| 出版日期 | 2017 |
| 卷号 | 320页码:3-6 |
| 关键词 | Coatings - Defect density - Defects - Deposition - Deposition rates - Electron beams - Evaporation - Monolayers - Multilayers - Physical vapor deposition - Thermal evaporation - Zinc sulfide |
| ISSN号 | 0257-8972 |
| 英文摘要 | In order to reduce the numbers of defects, the influence of deposition parameters (i.e., deposition rate and substrate temperature) and deposition methods (i.e., thermal evaporation and electron beam evaporation) on the defect density of ZnS monolayer, YbF3monolayer and ZnS/YbF3multilayer coatings deposited on silicon substrates were investigated experimentally. The results show that deposition rate and substrate temperature have major influence on the defect density. For ZnS monolayer coatings, the optimum deposition rate is approximately 1.2 nm/s, and the optimum substrate temperature is from 80 °C to 120 °C. Meanwhile, for YbF3monolayer coatings, the optimum deposition rate is approximately 0.4 nm/s, and the optimum substrate temperature is from 100 °C to 150 °C. Furthermore, the defect density of ZnS or YbF3monolayer coatings deposited by thermal evaporation is much lower than that by electron beam evaporation. The defect density of ZnS/YbF3multilayer coatings can be reduced significantly by optimizing the substrate temperature and deposition rate with the method of thermal evaporation. © 2017 Elsevier B.V. |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/8898]  |
| 专题 | 光电技术研究所_薄膜光学技术研究室（十一室） |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China; 2.University of Chinese Academy of Science, Beijing; 100049, China |
| 推荐引用方式 GB/T 7714 | Zhang, Yinhua,Xiong, Shengming,Huang, Wei. Study on defects in ZnS/YbF3infrared coatings on silicon substrates[J]. Surface and Coatings Technology,2017,320:3-6. |
| APA | Zhang, Yinhua,Xiong, Shengming,&Huang, Wei.(2017).Study on defects in ZnS/YbF3infrared coatings on silicon substrates.Surface and Coatings Technology,320,3-6. |
| MLA | Zhang, Yinhua,et al."Study on defects in ZnS/YbF3infrared coatings on silicon substrates".Surface and Coatings Technology 320(2017):3-6. |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。