SiNx thickness dependence of spectral properties and durability of protected-silver mirrors
文献类型:期刊论文
作者 | Xu, Xu1,2; He, Wenyan1,2; Wang, Changjun1; Wei, Ming1; Li, Bincheng1,3 |
刊名 | Surface and Coatings Technology
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出版日期 | 2017 |
卷号 | 324页码:175-181 |
关键词 | Corrosion - Corrosion resistance - Environmental testing - Mirrors - Protective coatings - Reflection - Scanning electron microscopy - Silicon nitride - Silver |
ISSN号 | 0257-8972 |
英文摘要 | Both long-term environmental durability and high broadband reflectance of protected-silver mirrors are of great importance to the developments of optical instruments for a variety of applications under harsh environments. In this paper, the dependences of spectral properties and environmental durability of protected-silver mirrors with a Sub/NiCrNx/Ag/NiCrNx/SiNx/Air structure on thickness of SiNxprotective layer were investigated in details. The reflectance, transmittance, total scattering loss measurements and scanning electron microscope (SEM) imaging were employed to characterize the spectral properties and surface morphology, and accelerated environmental tests, including humidity test and salt fog test, were applied to investigate the environmental durability. Five magnetron-sputtering prepared protected-silver mirrors with SiNxlayer thicknesses between 8 nm to 16 nm were tested. The results showed that both optical and corrosion-resistant properties of protected-silver mirrors were SiNxthickness dependent and the optimum SiNxthickness should be approximately 14 nm for Sub/NiCrNx/Ag/NiCrNx/SiNx/Air protected-silver mirrors to have both reasonably high reflectance in the visible spectral range and high corrosion resistance for long lifetime applications in harsh environments. © 2017 Elsevier B.V. |
语种 | 英语 |
源URL | [http://ir.ioe.ac.cn/handle/181551/8899] ![]() |
专题 | 光电技术研究所_薄膜光学技术研究室(十一室) |
作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.Graduate School of the Chinese Academy of Sciences, Beijing; 100039, China; 3.School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu; 610054, China |
推荐引用方式 GB/T 7714 | Xu, Xu,He, Wenyan,Wang, Changjun,et al. SiNx thickness dependence of spectral properties and durability of protected-silver mirrors[J]. Surface and Coatings Technology,2017,324:175-181. |
APA | Xu, Xu,He, Wenyan,Wang, Changjun,Wei, Ming,&Li, Bincheng.(2017).SiNx thickness dependence of spectral properties and durability of protected-silver mirrors.Surface and Coatings Technology,324,175-181. |
MLA | Xu, Xu,et al."SiNx thickness dependence of spectral properties and durability of protected-silver mirrors".Surface and Coatings Technology 324(2017):175-181. |
入库方式: OAI收割
来源:光电技术研究所
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