大尺寸全息光栅曝光系统及条纹锁定系统
文献类型：学位论文
| 作者 | 张栋 |
| 文献子类 | 硕士 |
| 导师 | 赵成强 |
| 关键词 | 全息光栅 holographic grating 干涉条纹 interference fringe 相位锁定 phase locking 光栅周期 grating period |
| 其他题名 | Locking of the Fringe Position and Period in Large-size Holographic Grating Exposure |
| 英文摘要 | 大尺寸全息衍射光栅在高功率啁啾脉冲放大系统、大口径天文望远镜等系统中具有重要应用。全息光栅曝光的基本原理为两大口径平面波在光栅基板区域干涉并被光刻胶记录。曝光时外界环境的干扰会影响条纹相位造成光栅对比度下降，因而需要引入条纹锁定系统，保证干涉条纹相位的稳定。 制造大尺寸全息光栅方法有：拼接法、静态干涉场曝光和扫描干涉场曝光。对三种方案的优缺点及难点进行了比较。介绍了大尺寸全息光栅曝光系统的结构和原理。分析了条纹相位变化对光栅对比度的影响。通过针孔滤波获得高质量点光源。对影响曝光质量的一些因素，如：激光器的稳定性、基板放置角度、光束夹角变化等进行了分析。 温度变化、空气流动、振动等外界干扰会影响曝光干涉条纹相位。构建了由三组条纹监视系统、计算控制系统和两组压电位移台组成的曝光条纹锁定系统，实现了条纹平移和周期的同时锁定。介绍了通过参考光栅检测条纹状态变化的原理。条纹平移量通过互相关计算。使用两组监视系统实现条纹周期变化的检测。介绍了控制程序的主要流程及各部分的功能。 通过搭建的条纹监视系统检测环境对曝光条纹的影响。未采用条纹锁定系统时：3小时内条纹平移均方根值为1.87λ，周期变化的均方根值为1.2λ，难以满足光栅制作要求。采用锁定系统后光栅槽型和对比度明显优于未锁定时的情形。锁定的精度为：平移变化的3σ值为0.009λ，周期变化均方根值为0.017λ，实现了较好的锁定效果。光栅实样的衍射效率为98.1%。设计实验并分析平移锁定和周期锁定间的干扰对锁定精度的影响。采用条纹锁定系统可极大降低光栅曝光对环境稳定性的要求。; Large-size holographic diffraction gratings play a significant role in high power chirped pulse amplification system, large aperture telescope and other systems. The basic principle of holographic grating exposure is that two plane waves interfere at substrate area and recorded by photoresist. Grating fringes will vary during exposure due to environmental affect, which can decrease the greeting contrast. Therefore, the locking system is needed to ensure the stability of interference fringe phase. The manufacture methods of large-size holographic grating are: mosaic method, static interference lithography and scanning beam interference lithography. The advantages and disadvantages of the three methods and the difficulties are compared. The structure and principle of large-size holographic grating exposure system are introduced. The influence of fringe phase variation on the grating contrast are analyzed. The high-quality point light source is obtained through pinhole filter. Some factors that affect the quality of exposure, such as the stability of the laser, the substrate placement angle and beam angle variation are analyzed. Factors such as temperature variation, air flow and vibration can affect the exposure fringe phase. A fringe locking system composed of three monitoring subsystems, a computation and control subsystem and two piezo nanopositioners is set up. The translation and period of fringes can be locked at the same time. The principle of detecting the change of the fringe state by reference grating is introduced. Two sets of monitoring system are used to detect fringe period variation. The fringe translation is calculated by cross-correlation. The main flow of the control program and the functions of each part are introduced. The environmental effect on exposure fringe is detected by fringe monitoring system. The results without locking system are: the root-mean-square(RMS) value of fringe translation is 1.87λ within 3 hours; the RMS value of the periodic variation is 1.2λ. It is difficult to meet the requirement of grating fabrication. The groove shape and contrast of gratings are improved significantly after locking. The locking precision: the 3σ value of the fringe translation is 0.009λ; the RMS value of the periodic variation is 0.017λ, which achieves a better locking result. The diffraction efficiency of sample grating is 98.1% It is experimentally verified and analyzed whether the interference between the translation lock and the periodic lock will affect the locking accuracy. The implementation of fringe locking system will greatly reduce the requirements of grating exposure system on the environmental stability. |
| 学科主题 | 光学工程 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/31022]  |
| 专题 | 中国科学院上海光学精密机械研究所 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | 张栋. 大尺寸全息光栅曝光系统及条纹锁定系统[D]. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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