超材料微纳结构与器件的设计、制备及光电性能研究
文献类型：学位论文
| 作者 | 白正元 |
| 文献子类 | 博士 |
| 导师 | 张龙 |
| 关键词 | 超材料 metamaterials 微波器件 microwave device 电磁屏蔽 electromagnetic shielding 纳米阵列 nano array 自组装 self-assembling |
| 其他题名 | Design, preparation and photoelectric properties of the micro/nanostructures and devices based on metamaterials |
| 英文摘要 | 自从本世纪初，超材料第一次被提出以来，其在科学领域所表现出的新奇物理现象和巨大应用潜力便牢牢吸引了科研人员的目光，在短短十几年间，已迅速发展成为物理学、电磁学、材料学以及纳米科学等前沿交叉领域的研究热点。超材料是一种新型的由人工微纳复合而成的周期性结构材料，它不仅是一种新颖的材料形态，更是一种特殊的材料设计理念。用超材料设计思想去探索和解决自然科学中所遇到的各种问题，已成为了一种崭新的技术手段。本课题研究基于超材料的基本设计理论和方法，针对光窗电磁屏蔽和微纳光电子技术领域的相关研究热点，开展了相关多种微纳结构与器件的设计研究工作，并详细探索了相关的制备工艺和光电性能。具体内容如下： 首先，针对目前光窗电磁屏蔽技术领域存在的技术问题和应用需求，深入开展了微波波段超材料器件的设计研究。提出并验证了新型窄带通超材料滤波器件，实现了1-18 GHz雷达波段灵活可调的窄带通滤波功能，并具备从单带通至多带通灵活扩展的能力。利用有限元电磁仿真研究了该结构的空间谐振电磁场分布，详细阐述了其带通滤波物理机理。同时，采用简化LC等效电路模型，分析了该器件的参数调节特性。通过理论模拟和实验测试证实了所设计的窄带通超材料滤波器件具有低占空比、极化和角度不敏感以及宽带范围灵活可调等优异性能。 在窄带通超材料滤波器设计的基础上，设计并验证了具有超薄厚度的新型超材料吸波器件，在实现近完美电磁吸收的同时，其整体结构依然保持了低占空比特性，可满足红外-可见光波段的高透过率需求。利用有限元三维电磁模拟深入探讨了该器件的电磁波吸收机理，并结合实验测试证实了所设计的超材料吸波器同样具有低占空比、宽角度入射和极化不敏感等优异性能。 针对近红外至可见光波段，开展了金属纳米阵列结构的制备和光学性质的研究。首先，采用“气液界面自组装”方法，探索了单层胶体纳米球二维周期阵列的制备工艺，分别研究制备了具有不同周期尺寸的单层猫眼石和反猫眼石结构模板。 基于上述所制备的单层二维周期模板，分别研究了金（Au）和银（Ag）两种贵金属纳米阵列结构的制备工艺。提出了二次退火法，研究制备出了Ag二维纳米阵列结构，并通过工艺参数的对比分析对具体制备方案进行系统地优化。通过精确控制金属薄膜的沉积厚度和退火工艺，制备和优化了具体不同纳米孔深度和纳米颗粒大小的Au二维纳米阵列结构，并探讨了其结构形成机理。系统地研究了所制备的Ag/Au二维纳米阵列结构的光学性质，证明了其优异的宽带局域表面等离子体谐振和光学荧光增强特性。 将金属与半导体材料复合，研究制备了Au/ITO二维复合纳米材料结构阵列。通过制备参数对比并结合金属薄膜去湿理论，深入分析了该复合结构的形成机理和最佳工艺参数。通过线性和非线性光学测试分析，证实了Au/ITO二维复合纳米材料结构阵列具有优异的近红外光学性能和潜在应用。 基于超材料的基本理论和方法所提出的新型微纳结构与器件，具有十分优异的光电性能，将在光窗电磁屏蔽及新型微纳光电子器件等领域具有重要的潜在应用。此外，所提出的结构设计思想以及二维纳米阵列的制备方法也为后续开展相关理论和实验研究提供了重要参考。; Since it was firstly proposed at the beginning of this century, metamaterials have attracted much attention of the scientists due to their novel properties and high potential in applications, and they have been the common highlights in the fields of physics, electromagnetics, materials and nano sciences. Metamaterials are a novel kind of artificial micro/nano periodical structures and composites, they are not only a new form of materials, but also a special idea of material design. Therefore, it has been a new way for people to explore and solve varieties of problems in nature by the idea of metamaterials design. In this dissertation, the metamaterials based micro/nano structures and devices were designed and prepared for the electromagnetic window shielding and micro/nano photoelectronic application. The fabrication and photoelectronic properties were also explored in detail. The main contents of the dissertation are as follows: Firstly, several metamaterial microwave devices were proposed for the electromagnetic window shielding applications. The novel metamaterial bandpass filter was designed and proved to have the flexible and tunable narrow bandpass properties in the 1-18 GHz radar frequency band. This design can also be expanded to have the multi-bandpass abilities. Electromagnetic simulations based on finite element method were used to explore the spatial electromagnetic field distributions in the structure in order to better under the physical mechanism. Moreover, the simplified LC circuit model was used to analyse the parameter adjustment features. The theoretical simulation and experimental measurement both demonstrated that the proposed metamaterial narrow bandpass filter has excellent properties such as low duty cycle, polarization and incident angles insensitive and wide band tunable flexibilities. Based on the design of metamaterial narrow bandpass filter, the novel ultra-thin metamaterial microwave absorber was designed and proved to realize the nearly perfect absorption. This designed structure also has a very low duty cycle which can meet the requirement for the high transmittance of the IR-visible waves. Electromagnetic simulations based on finite element method were also used to explore its absorption mechanism. Based on the simulated and experimental results, the proposed metamaterial absorber was also demonstrated of excellent properties such as low duty cycle, polarization and incident angles insensitive abilities. In the visible to near infrared region, the fabrication and optical properties of the metal nano-structured arrays were studied. Firstly, fabrication of the monolayer periodic structure based on colloid nanospheres was studied. The monolayer opal and inverse opal structures with different sizes were fabricated respectively. Based on the monolayer periodic structured template, fabrications of Au and Ag 2D nano arrays were studied respectively. First, “two-step annealing” method was proposed to fabricate the Ag 2D nano arrays. The method was analysed and optimized through comparison of the fabrication parameters. Second, Au 2D nano arrays with different depth of nano holes and size of Au nanoparticles were fabricated and optimized by accurately controlling the Au deposition and annealing processes. The formation mechanism of the structures was also discussed. Optical properties of the Au and Ag 2D nano arrays were studied in detail, and the results demonstrated their excellent broad band localized surface plasmon resonance and optical fluorescence enhancement abilities. Au/ITO 2D nanocomposite arrays were fabricated by combining the metal and semiconductors together. Both the formation mechanism and the best fabrication parameters of the structures were thoroughly studied by experiment comparison and dewetting theory. Based on the optical test results, the Au/ITO 2D nanocomposite arrays were demonstrated with excellent properties and potential applications in the near infrared region. In summary, the designed and fabricated novel micro/nano structures and devices based on metamaterials have shown their excellent photoelectric properties, which will have great potentials for the electromagnetic window shielding and micro/nano photoelectronic applications. Moreover, the proposed ideas of structure design and the fabrication methods of 2D nano arrays have also provided important references for the future studies in both theory and experiment. |
| 学科主题 | 材料学 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/30960]  |
| 专题 | 中国科学院上海光学精密机械研究所 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | 白正元. 超材料微纳结构与器件的设计、制备及光电性能研究[D]. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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