非接触式高精度透镜中心厚测量技术研究
文献类型：学位论文
| 作者 | 金超群 |
| 文献子类 | 硕士 |
| 导师 | 杨宝喜 |
| 关键词 | 透镜中心厚 lens central thickness 低相干光干涉 low-coherence interferometry 腔式测量结构 cavity structure 高相干光干涉 high-coherence ranging technology 双路平衡检测 balanced detection |
| 其他题名 | Research on A Noncontact Measurement of Lens Central Thickness with High Precision |
| 英文摘要 | 光学透镜是光学系统的重要元件，透镜的中心厚度是直接影响透镜焦距和光学系统成像质量的重要参数。对于高精密光学系统的研制，则需要高精度的透镜中心厚度检测设备。光纤低相干光干涉技术对光程差的变化十分敏感，因此具有很高的空间层析能力，且光纤结构具有很强的抗电磁干扰能力，体积小，易于集成。因此本文将以光纤低相干光干涉测量技术为基础，结合高相干测距技术展开研究，提出了一种腔式透镜中心厚测量系统，可以实现在待测透镜材料折射率未知的情况下对透镜中心厚进行高效率、高精度和非接触式检测，主要包括以下几个方面： 1、对国内外透镜中心厚测量方法的研究现状进行总结，并分析现有各种技术的优缺点；对低相干光干涉技术的发展、现状和优点进行阐述，明确了本文的研究目的。 2、从光的干涉原理出发，分析了低相干光干涉测量的原理和高相干光干涉测距的原理。提出了一种腔式结构测量透镜中心厚的方法，改变低相干光干涉测量臂的结构，利用两块平行放置的平板玻璃组成标准测量腔，通过对比待测光学样品插入腔体前后光程的变化来实现在样品材料折射率未知的情况下对中心厚的测量，同时根据样品的光学延迟和物理厚度的关系得到样品材料在1310nm光波下的群折射率，可用于对材料种类的初步辨别。 3、设计并搭建了基于光纤迈克尔逊干涉仪结构的腔式透镜中心厚测量系统，并对透镜中心厚的算法展开研究。 针对该系统测量信号中存在的本底噪声的干扰问题，设计了基于光纤马赫曾德干涉仪结构的腔式透镜中心厚测量系统，该系统利用双路平衡测量方法消除了干涉信号中的本底直流信号，提高了干涉信号的信噪比。利用实验系统进行透镜中心厚的测量，验证了基于低相干光干涉法的腔式中心厚测量方法的可行性。 4、设计了低相干光干涉透镜中心厚测量系统的工程结构，根据元器件的特性设计了延迟扫描机箱和控制机箱，并装调出产品样机。; Optical lens is an important component of the optical system. Critical lens parameters such as central thickness directly affect the focal length of the lens and the imaging quality of the optical system. Therefore, the high-precision optical system requires a high-accuracy measurement equipment to detect the lens central thickness. The low-coherence interferometry technology is very sensitive to the optical path difference, which has a high spatial chromatography capability. The fiber optic has a strong anti-electromagnetic interference, small size, easy to be integrated. This paper gives the detailed study of the cavity structure measurement method of lens central thickness, based on the low-coherence interferometry and the high-coherence ranging technology. This method can achieve a high-effective, high-precision and noncontact measurement for the lens central thickness without knowing the material refractive index. This paper principally includes the following aspects: 1. This paper summarizes the current research status of the measurement method of lens central thickness at home and abroad, analyzes the advantages and disadvantages of existing technologies and describes the development, the current situation and advantages of the low-coherence interference technology which explains the purposes of research. 2. The principles of low-coherence interferometry and high-coherence interferometry are theoretically analyzed in this paper. This paper presents a cavity structure for measuring the lens central thickness, by changing the measuring arm structure of the low-coherence interferometry. This measurement method utilizes two parallel-placed plate glasses to constitute the standard measuring cavity structure and achieves the central lens thickness without knowing material refractive index by comparing the optical path-length difference before and after the optical sample is inserted to this cavity structure. It can also get group refractive index of material at the wavelength of 1310 nm, which can be used to identify the kinds of optical materials. 3. A lens central thickness measurement system based on Michelson interferometer structure is designed and constructed in order to research the algorithm of the central lens thickness. To improve the interference problem of the existing background noises in the measurement signal of this system, the cavity structure measurement of the lens central thickness based on Mach-Zehnder interferometer is designed, which uses the balanced detection to eliminate the background DC signal, and improves the signal-to-noise ratio of the interference signal. The feasibility of the cavity structure measurement based on low-coherence interferometry is verified by measuring the central lens thickness in the experimental system. 4. The engineering structure of the lens central thickness measuring system based on the low-coherence interference is designed. The delay scanning chassis and the control chassis are designed according to the component property and then the model machine is installed. |
| 学科主题 | 光学工程 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/30934]  |
| 专题 | 中国科学院上海光学精密机械研究所 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | 金超群. 非接触式高精度透镜中心厚测量技术研究[D]. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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