An Excellent Performance Optical System for Freeform Pupil Illumination Module in Immersion Photolithography Machine
文献类型：期刊论文
| 作者 | Zeng Zongshun1; Niu Zhiyuan2; Zhang Fang; Ma Xiaozhe1; Zhu Siyu1; Shi Weijie2; Zeng Aijun1; Huang Huijie1 |
| 刊名 | SIXTH INTERNATIONAL CONFERENCE ON OPTICAL AND PHOTONIC ENGINEERING (ICOPEN 2018)
 |
| 卷号 | 10827 |
| ISSN号 | 0277-786X |
| 文献子类 | 会议论文 ; Proceedings Paper |
| WOS记录号 | WOS:1082732 |
| 出版者 | SPIE-INT SOC OPTICAL ENGINEERING |
| 资助机构 | Intergovernmental International Cooperation Program in Science and Technology Innovation [2016YFE0110600]; International Science & Technology Cooperation Program of Shanghai [16520710500]; Science and Technology Commission of Shanghai Municipality [17YF1429500]; Youth Innovation Promotion Association CAS ; Intergovernmental International Cooperation Program in Science and Technology Innovation [2016YFE0110600]; International Science & Technology Cooperation Program of Shanghai [16520710500]; Science and Technology Commission of Shanghai Municipality [17YF1429500]; Youth Innovation Promotion Association CAS |
| 源URL | [http://ir.siom.ac.cn/handle/181231/30906]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 1.Chinese Acad Sci, Lab Informat Opt & Optoelect Technol, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.Dongfang Jingyuan Electron Ltd, Beijing 100176, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zeng Zongshun,Niu Zhiyuan,Zhang Fang,et al. An Excellent Performance Optical System for Freeform Pupil Illumination Module in Immersion Photolithography Machine[J]. SIXTH INTERNATIONAL CONFERENCE ON OPTICAL AND PHOTONIC ENGINEERING (ICOPEN 2018),10827. |
| APA | Zeng Zongshun.,Niu Zhiyuan.,Zhang Fang.,Ma Xiaozhe.,Zhu Siyu.,...&Huang Huijie. |
| MLA | Zeng Zongshun,et al."An Excellent Performance Optical System for Freeform Pupil Illumination Module in Immersion Photolithography Machine".SIXTH INTERNATIONAL CONFERENCE ON OPTICAL AND PHOTONIC ENGINEERING (ICOPEN 2018) 10827 |
入库方式： OAI收割
来源：上海光学精密机械研究所
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