Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse
文献类型：期刊论文
| 作者 | Liu, Xin1,2,3; Sanner, Nicolas3; Sentis, Marc3; Stoian, Razvan4; Zhao, Wei1 ; Cheng, Guanghua1; Uteza, Olivier3
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| 刊名 | APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
 |
| 出版日期 | 2018-02-01 |
| 卷号 | 124期号:2 |
| ISSN号 | 0947-8396 |
| DOI | 10.1007/s00339-018-1634-1 |
| 产权排序 | 1 |
| 英文摘要 | Single-shot Gaussian-Bessel laser beams of 1 ps pulse duration and of similar to 0.9 mu m core size and similar to 60 mu m depth of focus are used for drilling micro-channels on front side of fused silica in ambient condition. Channels ablated at different pulse energies are fully characterized by AFM and post-processing polishing procedures. We identify experimental energy conditions (typically 1.5 mu J) suitable to fabricate non-tapered channels with mean diameter of similar to 1.2 mu m and length of similar to 40 mu m while maintaining an utmost quality of the front opening of the channels. In addition, by further applying accurate post-polishing procedure, channels with high surface quality and moderate aspect ratio down to a few units are accessible, which would find interest in the surface micro-structuring of materials, with perspective of further scalability to meta-material specifications. |
| 语种 | 英语 |
| WOS记录号 | WOS:000424515500126 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/30782]  |
| 专题 | 西安光学精密机械研究所_瞬态光学技术国家重点实验室 |
| 作者单位 | 1.Xian Inst Opt & Precis Mech CAS, State Key Lab Transient Opt & Photon, Xian 710119, Shaanxi, Peoples R China; 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China; 3.Aix Marseille Univ, CNRS, UMR LP3 7341, F-13288 Marseille, France; 4.Univ Jean Monnet, Univ Lyon, UMR CNRS 5516, Lab Hubert Curien, F-42000 St Etienne, France |
| 推荐引用方式 GB/T 7714 | Liu, Xin,Sanner, Nicolas,Sentis, Marc,et al. Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,2018,124(2). |
| APA | Liu, Xin.,Sanner, Nicolas.,Sentis, Marc.,Stoian, Razvan.,Zhao, Wei.,...&Uteza, Olivier.(2018).Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,124(2). |
| MLA | Liu, Xin,et al."Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse".APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 124.2(2018). |
入库方式： OAI收割
来源：西安光学精密机械研究所
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