Improved metal assisted chemical etching method for uniform, vertical and deep silicon structure
文献类型：期刊论文
| 作者 | Miao, Bin; Zhang, Jian; Ding（张鉴）, Xiangzhen; Wu, Dongmin; Wu, Yihui; Lu, Wenhui; Li, Jiadong |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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| 出版日期 | 2017 |
| 语种 | 英语 |
| 源URL | [http://ir.sinano.ac.cn/handle/332007/5464]  |
| 专题 | 苏州纳米技术与纳米仿生研究所_大科学装置 |
| 推荐引用方式 GB/T 7714 | Miao, Bin,Zhang, Jian,Ding,et al. Improved metal assisted chemical etching method for uniform, vertical and deep silicon structure[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2017. |
| APA | Miao, Bin.,Zhang, Jian.,Ding.,Wu, Dongmin.,Wu, Yihui.,...&Li, Jiadong.(2017).Improved metal assisted chemical etching method for uniform, vertical and deep silicon structure.JOURNAL OF MICROMECHANICS AND MICROENGINEERING. |
| MLA | Miao, Bin,et al."Improved metal assisted chemical etching method for uniform, vertical and deep silicon structure".JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2017). |
入库方式： OAI收割
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