A large size MEMS scanning mirror for speckle reduction application
文献类型：期刊论文
| 作者 | Li, Fanya; He, Jiahui; Shen, Wenjiang(沈文江); Zhou, Peng; Yu, Huijun; Ma, Fei; Shen WJ(沈文江) |
| 刊名 | 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
 |
| 出版日期 | 2017 |
| 语种 | 英语 |
| 源URL | [http://ir.sinano.ac.cn/handle/332007/5276]  |
| 专题 | 苏州纳米技术与纳米仿生研究所_纳米器件及相关材料研究部_沈文江团队 |
| 通讯作者 | Shen WJ(沈文江) |
| 推荐引用方式 GB/T 7714 | Li, Fanya,He, Jiahui,Shen, Wenjiang,et al. A large size MEMS scanning mirror for speckle reduction application[J]. 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017,2017. |
| APA | Li, Fanya.,He, Jiahui.,Shen, Wenjiang.,Zhou, Peng.,Yu, Huijun.,...&沈文江.(2017).A large size MEMS scanning mirror for speckle reduction application.2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. |
| MLA | Li, Fanya,et al."A large size MEMS scanning mirror for speckle reduction application".2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 (2017). |
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