Fully solution-processed metal oxide thin-film transistors via a low temperature aqueous route
文献类型:期刊论文
作者 | Liang, Lingyan; Zhu, Deliang; Xu, Jian-Bin; Xu, Wangying; Long, Mingzhu; Zhang, Tiankai; Cao, Hongtao |
刊名 | CERAMICS INTERNATIONAL
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出版日期 | 2017 |
卷号 | 43期号:8页码:6130-6137 |
ISSN号 | 0272-8842 |
英文摘要 | We report a facile and low-temperature aqueous route for the fabrication of various oxide thin films (Al2O3, In2O3 and InZnO). A detail study is carried out to reveal the formation and properties of these sol-gel-derived thin films. The results show that the water-based oxide thin films undergo the decomposition of nitrate group as well as conversion of metal hydroxides to form metal oxide framework. High quality oxide thin film could be achieved at low temperature by this aqueous route. Furthermore, these oxide thin films are integrated to form thin-film transistors (TFTs) and the electrical performance is systematically studied. In particular, we successfully demonstrate In2O3/Al2O3 TFTs with high mobility of 30.88 cm(2) V-1 s(-1) and low operation voltage of 4 V at a maximum processing temperature of 250 degrees C. |
公开日期 | 2017-12-25 |
源URL | [http://ir.nimte.ac.cn/handle/174433/13811] ![]() |
专题 | 2017专题 |
推荐引用方式 GB/T 7714 | Liang, Lingyan,Zhu, Deliang,Xu, Jian-Bin,et al. Fully solution-processed metal oxide thin-film transistors via a low temperature aqueous route[J]. CERAMICS INTERNATIONAL,2017,43(8):6130-6137. |
APA | Liang, Lingyan.,Zhu, Deliang.,Xu, Jian-Bin.,Xu, Wangying.,Long, Mingzhu.,...&Cao, Hongtao.(2017).Fully solution-processed metal oxide thin-film transistors via a low temperature aqueous route.CERAMICS INTERNATIONAL,43(8),6130-6137. |
MLA | Liang, Lingyan,et al."Fully solution-processed metal oxide thin-film transistors via a low temperature aqueous route".CERAMICS INTERNATIONAL 43.8(2017):6130-6137. |
入库方式: OAI收割
来源:宁波材料技术与工程研究所
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