Growth of mirror-like ultra-nanocrystalline diamond (UNCD) films by a facile hybrid CVD approach
文献类型：期刊论文
| 作者 | Yang, Shuo; Jiang, Nan; You, Zhiheng; Xiao, Xiong; Lyu, Jilei; Man, Weidong |
| 刊名 | PLASMA SCIENCE & TECHNOLOGY
 |
| 出版日期 | 2017 |
| 卷号 | 19期号:5页码:UNSP 055505 |
| ISSN号 | 1009-0630 |
| 英文摘要 | In this study, growth of mirror-like ultra-nanocrystalline diamond (UNCD) films by a facile hybrid CVD approach was presented. The nucleation and deposition of UNCD films were conducted in microwave plasma CVD (MPCVD) and direct current glow discharge CVD (DC GD CVD) on silicon substrates, respectively. A very high nucleation density (about 1 x 10(11) nuclei cm(-2)) was obtained after plasma pretreatment. Furthermore, large area mirror-like UNCD films of Phi 50 mm were synthesized by DC GD CVD. The thickness and grain size of the UNCD films are 24 mu m and 7.1 nm, respectively. In addition, the deposition mechanism of the UNCD films was discussed. |
| 公开日期 | 2017-12-25 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/13849]  |
| 专题 | 2017专题 |
| 推荐引用方式 GB/T 7714 | Yang, Shuo,Jiang, Nan,You, Zhiheng,et al. Growth of mirror-like ultra-nanocrystalline diamond (UNCD) films by a facile hybrid CVD approach[J]. PLASMA SCIENCE & TECHNOLOGY,2017,19(5):UNSP 055505. |
| APA | Yang, Shuo,Jiang, Nan,You, Zhiheng,Xiao, Xiong,Lyu, Jilei,&Man, Weidong.(2017).Growth of mirror-like ultra-nanocrystalline diamond (UNCD) films by a facile hybrid CVD approach.PLASMA SCIENCE & TECHNOLOGY,19(5),UNSP 055505. |
| MLA | Yang, Shuo,et al."Growth of mirror-like ultra-nanocrystalline diamond (UNCD) films by a facile hybrid CVD approach".PLASMA SCIENCE & TECHNOLOGY 19.5(2017):UNSP 055505. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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