中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry

文献类型:期刊论文

作者Yu, Zhijian; Guo, Dongming; Guo, Liangchao; Du, Yuefeng; Shi, Zhifeng; Zhang, Zhenyu
刊名APPLIED SURFACE SCIENCE
出版日期2018
卷号427页码:409-415
关键词Commercially Pure Titanium Ti-6al-4v Ti Fatigue Deposition Surface Layer Steel Films
英文摘要In this study, a novel approach of CMP is developed using an environment-friendly slurry consisting of silica, hydrogen peroxide (H2O2), malic acid and deionized water. This is different from the traditional polishing, in which hazardous chemicals are used for Ti alloys. The surface roughness R-a of 0.68 nm is obtained over a measurement area of 70 x 53 mu m(2), which is lower than those previously reported for a Ti alloy. This is polished by the developed optimal CMP slurry. Polishing mechanism is investigated using electrochemical and X-ray photoelectron (XPS) measurements. H2O2 dominates the corrosion process during CMP using the developed environment-friendly slurry. Corrosion current of H2O2 is consistent with the reactants of titania, alumina and vanadia formed on the surfaces of Ti-6Al-4 V after CMP. Corrosion potential agrees well with the polished surface quality of Ti-6Al-4 V. Chemical reaction equations are proposed according to the electrochemical and XPS measurements. The developed CMP slurry sheds light on the application in environment protection for the Ti, Ti alloys and CMP industries. (C) 2017 Elsevier B.V. All rights reserved.
学科主题Electrochemistry
语种英语
公开日期2018-12-04
源URL[http://ir.nimte.ac.cn/handle/174433/16957]  
专题2018专题
推荐引用方式
GB/T 7714
Yu, Zhijian,Guo, Dongming,Guo, Liangchao,et al. A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry[J]. APPLIED SURFACE SCIENCE,2018,427:409-415.
APA Yu, Zhijian,Guo, Dongming,Guo, Liangchao,Du, Yuefeng,Shi, Zhifeng,&Zhang, Zhenyu.(2018).A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry.APPLIED SURFACE SCIENCE,427,409-415.
MLA Yu, Zhijian,et al."A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry".APPLIED SURFACE SCIENCE 427(2018):409-415.

入库方式: OAI收割

来源:宁波材料技术与工程研究所

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