Aqueous Solution Induced High-Dielectric-Constant AlOx : Y Films for Thin-Film Transistor Applications
文献类型：期刊论文
| 作者 | Liang, Lingyan; Wu, Weihua; Cao, Hongtao; Lan, Linfeng; Yao, Meiyi; Song, Anran; Liang, Yu; Yu, Jingjing; Javaid, Kashif |
| 刊名 | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
 |
| 出版日期 | 2018 |
| 卷号 | 18期号:11页码:7566-7572 |
| 关键词 | Amorphous Oxide Semiconductors Field-effect Transistors Low-temperature Gate Dielectrics Low-voltage Photochemical Activation Electrical Performance Combustion Synthesis High-mobility Electronics |
| 英文摘要 | Aqueous solution induced method is regarded as a promising route to realize high-performance metal oxide thin film transistors at low temperature with an economical and environment friendly process. In this paper, we report the synthesis of multi-component AlOx : Y dielectrics with a small amount of yttrium homogeneously distributed in AlOx matrix through an alternate spin-coating process. The AlOx : Y films demonstrate superior characteristics, such as improved surface morphology, better capacitance coupling effect, smaller dielectric dispersion, and similar leakage current density compared to AlOx films of nearly twofold thickness. By elevating the pre-baking temperature, the dielectric performance of AlOx : Y films has been further optimized, exhibiting a near-atomically smooth surface, a low current density of 8 x 2x10(-8) A cm(-2) at 2 MV/cm, and a dielectric constant of 7.4. And the corresponding thin-film transistor with amorphous InGaZnO channel shows a narrow working voltage range (< 2.5 V), a field-effect mobility around 10 cm(2) V-1 s(-1), and an on/off current ratio exceeding 107 coupled with the gate current lower than 1 nA in the entire operation range. |
| 学科主题 | Materials Science ; Physics |
| 语种 | 英语 |
| 公开日期 | 2018-12-04 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/17079]  |
| 专题 | 2018专题 |
| 推荐引用方式 GB/T 7714 | Liang, Lingyan,Wu, Weihua,Cao, Hongtao,et al. Aqueous Solution Induced High-Dielectric-Constant AlOx : Y Films for Thin-Film Transistor Applications[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2018,18(11):7566-7572. |
| APA | Liang, Lingyan.,Wu, Weihua.,Cao, Hongtao.,Lan, Linfeng.,Yao, Meiyi.,...&Javaid, Kashif.(2018).Aqueous Solution Induced High-Dielectric-Constant AlOx : Y Films for Thin-Film Transistor Applications.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,18(11),7566-7572. |
| MLA | Liang, Lingyan,et al."Aqueous Solution Induced High-Dielectric-Constant AlOx : Y Films for Thin-Film Transistor Applications".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 18.11(2018):7566-7572. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。