Structure of uniform and high-quality Al-doped ZnO films by magnetron sputter deposition at low temperatures
文献类型：期刊论文
| 作者 | Huang, Feng; Ge, Fangfang; Wang, Yun; Xu, Genbao; Peng, Shou; Meng, Fanping |
| 刊名 | 45th International Conference on Metallurgical Coatings and Thin Films (ICMCTF)
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| 出版日期 | 2018 |
| 页码 | 109-116 |
| 英文摘要 | modular reconfigurable manipulator; recursive Newton-Euler algorithm; operational space dynamics |
| 会议地点 | San Diego, CA |
| 出版者 | Materials Science; Physics |
| 公开日期 | 2018-12-04 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/17517]  |
| 专题 | 2018专题 |
| 推荐引用方式 GB/T 7714 | Huang, Feng,Ge, Fangfang,Wang, Yun,et al. Structure of uniform and high-quality Al-doped ZnO films by magnetron sputter deposition at low temperatures[J]. 45th International Conference on Metallurgical Coatings and Thin Films (ICMCTF),2018:109-116. |
| APA | Huang, Feng,Ge, Fangfang,Wang, Yun,Xu, Genbao,Peng, Shou,&Meng, Fanping.(2018).Structure of uniform and high-quality Al-doped ZnO films by magnetron sputter deposition at low temperatures.45th International Conference on Metallurgical Coatings and Thin Films (ICMCTF),109-116. |
| MLA | Huang, Feng,et al."Structure of uniform and high-quality Al-doped ZnO films by magnetron sputter deposition at low temperatures".45th International Conference on Metallurgical Coatings and Thin Films (ICMCTF) (2018):109-116. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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