Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry
文献类型：会议论文
| 作者 | Zhou, Yi1,2; Tang, Yan1; Deng, Qinyuan1,2; Zhao, Lixin1; Hu, Song1 |
| 出版日期 | 2017 |
| 关键词 | Microstructure - Modulation - Surface topography - Units of measurement |
| 卷号 | 10373 |
| 页码 | 103730G |
| 英文摘要 | Three-dimensional measurement and inspection is an area with growing needs and interests in many domains, such as integrated circuits (IC), medical cure, and chemistry. Among the methods, broadband light interferometry is widely utilized due to its large measurement range, noncontact and high precision. In this paper, we propose a spatial modulation depth-based method to retrieve the surface topography through analyzing the characteristics of both frequency and spatial domains in the interferogram. Due to the characteristics of spatial modulation depth, the technique could effectively suppress the negative influences caused by light fluctuations and external disturbance. Both theory and experiments are elaborated to confirm that the proposed method can greatly improve the measurement stability and sensitivity with high precision. This technique can achieve a superior robustness with the potential to be applied in online topography measurement. © 2017 SPIE. |
| 会议录 | 0277-786X
 |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9027]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.State Key Lab. of Optical Technol. for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China |
| 推荐引用方式 GB/T 7714 | Zhou, Yi,Tang, Yan,Deng, Qinyuan,et al. Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry[C]. 见:. |
入库方式： OAI收割
来源：光电技术研究所
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